Axcelis Announces First Order for 'Purion XE Power Series' Implanter
The Purion XE Power Series utilizes
Purion Power Series™
The Company's Purion Power Series was designed to meet the growing market demand for the power device market. The Purion Power Series was developed with enabling technology to specifically address the unique needs of emerging power device applications. This includes the flexibility to handle multiple wafer sizes from 150mm to 300mm as well as various substrates including Si and SiC, along with its precision wafer temperature control technology, all accomplished while delivering the industry's highest throughput and capital efficiency. The product line includes the Purion M Power Series™ for medium current, the Purion H Power Series™ for high current and the Purion XE Power Series™ for high energy.
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