Axcelis Announces Business Partnership With IBS (Ion Beam Services)

BEVERLY, Mass., Aug. 5, 2009 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has formed a business partnership to provide sales and support for the PULSION plasma immersion ion implanter manufactured by Ion Beam Services (IBS). IBS, headquartered in Peynier-Rousset, France, developed the PULSION plasma immersion system with proprietary polarization technology and a unique pulsed plasma configuration. The PULSION system achieves high process stability at ultra low energy while offering high dose process versatility at both 200 and 300mm.

Mary Puma, chairman and CEO commented, "We are very excited about the unique and enabling technology developed by the IBS team. The PULSION plasma immersion technology offers memory and logic chipmakers compelling cost and performance advantages for ultra high dose applications than what are currently available on the market today." She added, "This agreement allows Axcelis to provide customers with a broader portfolio of products to meet requirements driven by the ITRS roadmap for decreasing device geometries as well as the emergence of novel transistor structures."

Dr. Laurent Roux, chairman and CEO of IBS, stated, "The combination of IBS technology and products with Axcelis' world class customer support provides a powerful solution to customer's technology requirements for plasma implant in advanced memory and logic applications. The unique process performance and low cost of ownership of the PULSION product line offer superior alternatives to plasma implant." He concluded, "Partnering with Axcelis gives IBS immersion plasma products instant global coverage and customer support."

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

IBS (Ion Beam Services) is the European leader for ion implantation solutions. Since 1987, IBS offers ion implantation foundry services, R&D services and production ion implanters manufacturing. IBS has production facilities and services centers in Europe and Asia as well as offices in Bathgate, Scotland and Singapore and is headquartered in Peynier-Rousset, France. More information about IBS is available on line at www.ion-beam-services.com.

CONTACT: Axcelis Technologies, Inc.
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