Axcelis Lands Multiple Orders for Its Optima HDx High Current Implanter, Momentum Grows

System Delivers Significant Advantages in Productivity & Capital EfficiencyBEVERLY, Mass., Jan 20, 2010 (GlobeNewswire via COMTEX) -- Axcelis Technologies, Inc. (Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received multiple orders for the company's Optima HDx high current implanter, including new penetrations as well as repeat capacity buys. The orders come from both logic and memory customers in Asia and Europe, and begin shipping in the first quarter of 2010. These new systems join several Optima HDs currently in the field that have been elevated to Optima HDx performance with a popular upgrade package.

Mary Puma, chairman and CEO commented, "Axcelis developed the Optima HDx in anticipation of the growing need for higher beam currents and greater precision for high current implants. These recent orders demonstrate the value chipmakers place on the product's ability to break barriers in both of these areas. In addition to offering customers competitive technical capabilities for high current applications, the Optima HDx is receiving a strong reception from customers pleased to have a commercial alternative. We are excited to see the product achieve momentum with customers around the globe."

An extension of the company's Optima HD platform, the Optima HDx has been designed to provide chipmakers dramatically increased productivity and capital efficiency. The new Optima HDx features a unique combination of enhancements to maximize beam current, minimize beam set up time and eradicate energy contamination to deliver the most precise and repeatable performance in the high dose space. The systems unique spot beam technology and short beamline deliver the industry's highest drift beam currents, 38% higher than its competitors. To further enhance performance, its patented AutoTune beam tuning system has significantly accelerated both tune times and success rates, providing up to a 60% advantage over competitive systems, for increased fab productivity.

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

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SOURCE: Axcelis Technologies, Inc.

CONTACT:  Axcelis Technologies, Inc.
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