Axcelis Expands Reach of Optima HDx High Current Implanter With New Design Win for Multiple Fab Presence

System Selected for High Productivity and Capital EfficiencyBEVERLY, Mass., Feb 10, 2010 (GlobeNewswire via COMTEX) -- Axcelis Technologies, Inc. (Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received an order for the company's Optima HDx high current implanter from a leading chip manufacturer that extends the use of this technology across multiple fabs. The customer currently utilizes the Optima HDx for high volume manufacturing, and will now expand the deployment of the system to its newest fab.

Mary Puma, chairman and CEO commented, "We're very excited about this order, as it validates the attractiveness of the tool across multiple fab environments. This new win is part of a recent trend of orders for the Optima HDx, and demonstrates the growing acceptance and demand for our high current technology. We look forward to continuing to expand our installed base with this industry leader and supporting their evolving manufacturing and next generation development needs."

An extension of the company's Optima HD platform, the Optima HDx has been designed to provide chipmakers dramatically increased productivity and capital efficiency. The Optima HDx features a unique combination of enhancements to maximize beam current, minimize beam set up time and eradicate energy contamination to deliver the most precise and repeatable performance in the high dose space. The system's unique spot beam technology and short beamline deliver the industry's highest drift beam currents, 38% higher than its competitors. To further enhance performance, its patented AutoTune beam tuning system has significantly accelerated both tune times and success rates, providing up to a 60% advantage over competitive systems, for increased fab productivity.

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

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SOURCE: Axcelis Technologies, Inc.

CONTACT: Axcelis Technologies, Inc. Editorial/Media: Maureen Hart 978.787.4266 Financial Community Stephen Bassett 978.787.4000