Axcelis Integra(TM) Dry Strip System Selected by Major Foundry for Advanced IC Manufacturing

Production Proven Platform Demonstrates Advantages in Productivity and Process FlexibilityBEVERLY, Mass., Feb 17, 2010 (GlobeNewswire via COMTEX) -- Axcelis Technologies, Inc. (Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that a major foundry has selected the IntegraTM dry strip system for its most advanced production facility. The customer selected the Integra over competitive products because of its significant advantages in productivity, advanced process capabilities and manufacturing flexibility.

Mary Puma, chairman and CEO, commented, "The Integra is ideally suited for a high volume, foundry manufacturing environment because of its ability to productively execute the full range of existing strip processes for logic and memory flows, as well as its strength in executing next generation process development for non-oxidizing strip on exposed high k/metal gate levels. As chipmakers grapple with meeting the challenge of increasingly small feature sizes coupled with new material integration, they will require innovative systems that employ novel solutions. Axcelis' Integra is designed specifically to meet these diverse challenges."

The Integra dry strip system offers the highest manufacturing productivity on the market today for leading-edge memory and logic devices, and next generation process development. Its production proven, multi-chamber design includes paired-chamber process modules able to run production recipes with the highest throughputs available, with the unique ability to run separate processes in each module. This unmatched flexibility makes the system ideal for a variety of advanced cleaning applications in a high volume manufacturing environment.

Axcelis Technologies, Inc. (Nasdaq:ACLS), headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

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SOURCE: Axcelis Technologies, Inc.

CONTACT:  Axcelis Technologies, Inc.
Editorial/Media:
Maureen Hart
978.787.4266
Financial Community:
Stephen Bassett
978.787.4000