Axcelis Introduces New Integra ES(TM) Advanced Plasma Dry Strip Cleaning System
"The Integra ES sets a new standard for resist removal and cleaning technology. As chipmakers move towards smaller device structures and employ new materials, wafer cleaning technology that can remove resist and polymer residues without causing oxidation plays an increasingly important role in enabling optimized performance and ensuring device integrity," commented Bill Bintz, senior vice president of marketing. "The new system is the perfect synthesis of truly enabling technology and a production proven platform -- to fuel a new generation of invention in advanced device manufacturing."
The Integra ES features a unique combination of technology that has the ability to process wafers with novel, non-oxidizing chemistries, as well as subsequently cool the processed wafers in an inert environment to minimize oxidation. These technologies are critical for shallow source/drains, high k/metal gates and ultra-thin metal films applications. Built on the production proven, high productivity Integra platform, the new Integra ES is the only plasma dry strip system designed to run advanced, non-oxidizing strip processes effectively and efficiently in a high-volume manufacturing environment.
To learn more about the new Integra ES, as well as other Axcelis products, please visit our exhibit at SEMICON China in Shanghai from March 16-18. Axcelis is located in Booth #4000 at the Shanghai New International Expo Center (SNIEC).
Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.
This news release was distributed by GlobeNewswire, www.globenewswire.com
SOURCE: Axcelis Technologies, Inc.
CONTACT: Axcelis Technologies, Inc. Editorial/Media Maureen Hart 978.787.4266 Financial Community Stephen Bassett 978.787.4000
