Axcelis Wins Multiple System Order for Optima HDx(TM) High Current Implanters

May 3, 2010 at 8:06 AM EDT
Production Proven Platform Demonstrates Advantages in Process Performance, Productivity and Capital Efficiency

BEVERLY, Mass., May 3, 2010 (GlobeNewswire via COMTEX) --Axcelis Technologies, Inc. (Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received a multiple system order for the Optima HDxTM high current implanter from one of the world's largest semiconductor manufacturers in Asia. The company will use the systems at their most advanced production facilities. The systems are scheduled to start shipping this quarter. Axcelis expects to receive additional follow-on orders as the company continues to meet increasing market demand for its products.

Mary Puma, chairman and CEO commented, "We value the confidence this leading chipmaker has in the Optima HDx, which provides the unique combination of superior technology with increased productivity and capital efficiency." She added, "We're excited about the opportunity to expand our installed base with one of the most innovative leaders in chip manufacturing and the digital revolution, and work collaboratively to support their growth."

For more information on the innovative Optima HDx and our complete line of ion implantation systems, please visit www.axcelis.com.

Forward Looking Statements

This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Product manufacturing and delivery issues, customer order push-outs or cancellations and product performance could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

This news release was distributed by GlobeNewswire, www.globenewswire.com

SOURCE: Axcelis Technologies, Inc. 

CONTACT:  Axcelis Technologies, Inc.
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Maureen Hart
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Stephen Bassett
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