Axcelis Announces Timing & Availability of Third Quarter 2010 Results
and Conference Call

BEVERLY, Mass., Oct 14, 2010 (BUSINESS WIRE) --

Axcelis Technologies, Inc. (Nasdaq:ACLS) today announced it will hold its quarterly earnings call to discuss its results for the third quarter of fiscal 2010 on Wednesday, November 3, 2010 at 5:00 pm ET. The call will be available to interested listeners via an audio webcast that can be accessed through Axcelis' home page at www.axcelis.com, or by dialing 1-888-713-4199 (1-617-213-4861 outside North America). Participants calling into the conference call will be requested to provide the company name, Axcelis Technologies and pass code: 70472378. Webcast and telephone replays will be available from 8 pm ET on November 3, 2010 until 11:59 pm on February 1, 2011. Dial 1-888-286-8010 (1-617-801-6888 outside North America), and enter conference ID code# 32926165.

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

SOURCE: Axcelis Technologies, Inc.

Axcelis Technologies, Inc.
Maureen Hart (editorial/media), 978-787-4266
or
Stephen Bassett (financial community), 978-787-4000