Axcelis Lands an Additional High Volume Order for Innovative Plasma Dry Strip Systems From Another Leading Semiconductor Company

October 26, 2010 at 8:04 AM EDT
Productivity and Seamless Process Transfer Capability Cited as Key Factors

BEVERLY, Mass., Oct 26, 2010 (GlobeNewswire via COMTEX) --

Axcelis Technologies, Inc. (Nasdaq:ACLS) today announced that it has landed an additional high volume follow on order for its plasma dry strip systems from another of the world's leading semiconductor companies. The order, which includes the Company's Integra(TM) and Rapidstrip(TM) products, will be used to support capacity expansions at locations in both the U.S. and Asia.

"The innovative systems were selected over competitive products because they provide the dual advantages of facilitating the copy-exact transition to the new fab and providing a seamless process transfer to the newer, higher productivity Integra platform. This scenario provides minimal risk during this customer's aggressive ramp," said Bill Bintz, senior vice president of marketing for Axcelis Technologies. "This significant order is testament to the performance capabilities of both systems and the confidence our customers have in our excellent global customer support."

Axcelis' dry strip cleaning product portfolio includes the Integra RS and ES systems as well as the Rapidstrip 320 and 210 systems. Together, these products deliver highly differentiated plasma cleaning technology to meet the full range of customer needs, from the highest productivity, non-oxidizing solutions for 32nm and below chip makers, to single chamber, small substrate size applications in the MEMS, LED, and packaging markets.

Axcelis Technologies, Inc. (Nasdaq:ACLS), headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

This news release was distributed by GlobeNewswire, www.globenewswire.com

SOURCE: Axcelis Technologies, Inc. 

CONTACT:  Axcelis Technologies, Inc.
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