Axcelis Secures Major Design Win for Optima HDx High Current Implanter From Major Foundry

July 26, 2011 at 8:08 AM EDT

BEVERLY, Mass., Jul 26, 2011 (GlobeNewswire via COMTEX) --

Axcelis Technologies, Inc. (Nasdaq:ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that a major foundry has selected the Optima HDx high current implanter for their new, flagship manufacturing facility. The system is expected to ship in September, where it will be used in 28nm logic manufacturing.

"We're very pleased about securing this new penetration at one of the world's leading chip manufacturers, expanding our market presence," said Mary Puma, chairman and CEO of Axcelis Technologies, Inc. "The Optima HDx demonstrated remarkable technical advantages particularly in the area of low energy applications, as well as strong productivity to meet the demands of high volume manufacturing. We continue to focus on expanding our market share at new and existing customers, by executing on our design wins and delivering innovative, enabling technology to provide the highest level of customer satisfaction."

The Optima HDx high current implanter provides solutions for device manufacturing's lowest energy applications and highest dose requirements with the versatility and extendibility to provide solutions beyond today's 22nm technology node. Only Optima implanters combine these benefits with the productivity required to support the most technically advanced high volume manufacturing demands.

Safe Harbor Statement

This document contains forward-looking statements under the SEC safe harbor provisions. These statements, which include our expectations for orders and shipments, are based on management's current expectations and should be viewed with caution. They are subject to various risks and uncertainties, many of which are outside the control of the Company, including customer timing requests, the continuing demand for semiconductor equipment, continuity of business relationships with and purchases by customers, competitive pressure on sales and pricing, and global economic, political and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

This news release was distributed by GlobeNewswire, www.globenewswire.com

SOURCE: Axcelis Technologies, Inc.

CONTACT: Company Contacts:
Maureen Hart (editorial/media)
978.787.4266
Maureen.hart@axcelis.com
Jay Zager (financial community)
978.787.9408
jay.zager@axcelis.com