Axcelis Announces Strategic Service Partnership With ULVAC TECHNO

BEVERLY, Mass., Jan. 26, 2012 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced a strategic service partnership with ULVAC TECHNO, Ltd. to support Axcelis semiconductor processing systems in Japan.  The agreement gives Axcelis customers access to ULVAC TECHNO's vast service and support network in the region, to ensure the highest levels of productivity and manufacturing efficiency.

"We are excited about our relationship with ULVAC TECHNO, a company well known for its expertise in vacuum technology and proven track record in delivering innovative service programs that maximize the value of chip manufacturers equipment investment," said Mary Puma, chairman and CEO of Axcelis Technologies. "We look forward to working with ULVAC TECHNO to bring Japanese customers the latest innovations in ion implantation and plasma dry strip technology."

Under the agreement, ULVAC TECHNO will provide a comprehensive portfolio of service programs for Axcelis ion implantation, rapid thermal processing, curing and cleaning systems in Japan. These programs include install and warranty services and aftermarket support, including preventive and corrective maintenance, spare parts management, parts cleaning and coating. 

ULVAC TECHNO is a subsidiary of ULVAC, Inc., an international corporation founded in 1952 that designs, manufactures and markets equipment and materials for industrial applications of vacuum technology.  ULVAC TECHNO, headquartered in Kanagawa, Japan, was established in 1979 to focus exclusively on providing best in class service programs in Japan.  The company has 37 customer support centers across the region, strategically located near the country's leading semiconductor fabs.

Axcelis Technologies, Inc. (Nasdaq: ACLS) headquartered in Beverly, Massachusetts, USA, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

Company Contacts:

Maureen Hart (editorial/media) 978.787.4266
maureen.hart@axcelis.com

Jay Zager (financial community) 978.787.9408
jay.zager@axcelis.com

SOURCE Axcelis Technologies, Inc.