Axcelis Optima HDx High Current Implanter Achieves New Industry Milestone In Source Life Performance
"We're pleased to be able to offer customers this cost of ownership advantage, which reduces the annual operating cost of the fab," said
With the Eterna ELS3,
The new gas delivery system, SPECTRA™ Solifex, was selected because of its ability to maximize productivity and provide meaningful cost of capital savings. SPECTRA™ Solifex increases system productivity for specialty gases by delivering higher uptime, extended source life performance, and reduced consumables and preventative maintenance costs. These benefits result in high overall system productivity and fewer tools required in the manufacturing process. The compact, cost effective design combines both source and co-gas in a single cylinder, minimizing space requirements and simplifying maintenance.
The Optima HDx high current implanter provides solutions for device manufacturers highest dose requirements with the versatility and extendibility to provide solutions beyond today's 2Xnm technology node. For more information on the innovative Optima HDx and our complete line of ion implantation systems, please visit www.axcelis.com.
CONTACTS:
Richard Czepukojc, richard.czepukojc@linde.com
Paul Mittonette, paul.mittonette@linde.com
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