Axcelis Wins High Volume, Follow-on Order For Integra RS Plasma Dry Strip Systems From Major Chipmaker

BEVERLY, Mass., Aug. 29, 2012 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received a multiple system, follow-on order from one of the world's leading semiconductor manufacturers for the Company's Integra^TM RS plasma dry strip system. The systems will be used in production of 3x nm and below NAND Flash devices at leading edge fabs in Asia and the US.  The systems began shipping this month.

Mary Puma, chairman and CEO commented, "We're excited to expand our installed base with this industry leader and support their evolving manufacturing needs.  The Integra dry strip system has demonstrated superior manufacturing productivity for our memory customers, combined with process technologies extendable to the most advanced device nodes.  They value the ability of the system to efficiently handle standard dry strip processes together with critical cleaning steps over sensitive, exposed metals, on a single, modular wafer handling platform.  This unique combination of productivity and process performance makes the Integra the ideal choice for high volume manufacturing of leading edge memory."

Axcelis is a recognized leader in plasma cleaning and dry strip technology. The Company's systems are known worldwide for providing innovative process solutions, leading reliability and low cost of ownership. Axcelis' dry strip cleaning product portfolio includes the Integra RS and ES systems as well as the Rapidstrip^TM 320 and 210 systems. Together, these products deliver highly differentiated plasma cleaning technology to meet the full range of customer needs, from the highest productivity, non-oxidizing solutions for 28nm and below, to single chamber, small substrate size applications in the MEMS, LED, and packaging markets.

Axcelis Technologies, Inc. (Nasdaq: ACLS), headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

Company Contacts:
Maureen Hart (editorial/media) 978.787.4266
Maureen.hart@axcelis.com

Jay Zager (financial community) 978.787.9408
jay.zager@axcelis.com

SOURCE Axcelis Technologies, Inc.