Axcelis Receives Follow-on Order for Optima HDx High Current Implanter

BEVERLY, Mass., July 30, 2013 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received a follow-on order for the Optima HDx high current implanter from one of the world's leading chipmakers located in the Asia Pacific region. The Optima HDx will be used in high volume manufacturing of leading edge memory products and next generation device development. The system is scheduled to ship in the third quarter.

"We're pleased to be able to build on our relationship with this important customer and expand our installed base of Optima HDx implanters," said John Aldeborgh, executive vice president, customer operations. "This order extends our market leading position for systems that provide cold implant capability for chipmakers realizing the benefits of Axcelis' unique damage engineering solution to achieve leading edge device performance. The Optima HDx combines maximum dose rates, inherently found in its spot beam technology, with proprietary wafer temperature control during implantation, providing maximum productivity and process advantages."

The Optima HDx high current implanter provides solutions for device manufacturers' highest dose requirements with the versatility and extendibility to provide solutions beyond today's 2Xnm technology node. The Optima HDx includes the industry's most advanced ion source technology, coupled with Axcelis' innovative wafer temperature control system that maximizes yield and profitability, both of which are critical in today's challenging device manufacturing environment. The Optima HDx delivers this performance with a simple, low cost and highly reliable design, providing a significant advantage over more complex and costly designs. For more information on the innovative Optima HDx and our complete line of ion implantation systems, please visit www.axcelis.com.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. The Company's Internet address is: www.axcelis.com.

Company Contacts:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

SOURCE Axcelis Technologies, Inc.