Axcelis Receives Follow On Order For 'Purion XE' High Energy Implanter From Asian Foundry

BEVERLY, Mass., Sept. 3, 2014 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received a follow on order for the Company's Purion XE™ high energy implanter. The Purion XE, will be installed as part of a capacity expansion at another one of the chipmaker's fabs in the Asia Pacific Region, and will be used in high volume production of 28nm low power and specialty logic devices.  The system ships in September. 

John Aldeborgh, executive vice president, customer operations, said, "We're very excited about this new order and our growing installed base of Purion products at this foundry.  The Purion XE was selected over competitive systems because of the impressive performance of the first system in production, combined with industry leading productivity and exceptional process extendibility required for specialty devices."

The Purion XE, featuring Axcelis' industry leading LINAC technology, is the most advanced high energy system available today.  The system leverages the power of our Purion platform, providing chipmakers with absolute process precision and purity while delivering remarkable levels of productivity and capital efficiency.

The Purion Platform
The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield.   On this platform, we've built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for your fab. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Shield™ Contamination Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.   The platform's superior spot beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ high energy implanter.

Forward Looking Statements:
The statements in this press release regarding Axcelis' expectations for shipment, installation and use of a system are each a "forward-looking statement." While they express the current expectations of Axcelis management, certain risks and uncertainties could cause actual results to differ materially from those currently anticipated.   Among other factors, such risks and uncertainties include the right of a customer to cancel an order, or delay shipment or installation for a variety of reasons that may be outside of the Company's control. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.