Axcelis Announces Purion Platform Showcase At SEMICON Korea 2015
Axcelis Purion Showcase:
Visit the Axcelis Purion Showcase at Booth #5606 in Hall D to learn firsthand about the technical and manufacturing breakthroughs of the industry's first complete implant platform designed specifically for advanced 3D devices. The platform includes the Purion M™ mid current implanter, the Purion H™ high current implanter and the Purion XE™ high energy implanter.
The Company will also be presenting at the
Session 2: Advanced Process Technology
Implant Damage Engineering for Advanced Device Fabrication
Presented by
Room: #308,
For more info or to register, visit: http://www.semiconkorea.org/ko/node/2426
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