Axcelis Receives Multiple Orders From Several Foundries For Purion XE High Energy Implanter

BEVERLY, Mass., Jan. 29, 2015 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received multiple orders for its innovative Purion XE™ high energy implanter.  The orders include the penetration of two new 200mm foundries and a follow on order from a 300mm foundry. The Purion XE's will be used in high volume production of 28nm specialty logic, MEMS, image sensor and power devices. The systems are expected to ship in the first quarter. 

John Aldeborgh, executive vice president, customer operations, said, "The growing demand from the mobile, automotive and Internet of Things markets has created strong momentum for the Purion XE.  The Purion XE, featuring Axcelis' industry leading LINAC technology, is the most advanced high energy system available today. Its exceptionally broad energy range, high beam currents and low levels of metals contamination provide industry leading productivity, manufacturing flexibility and the highest device yield, making it ideally suited for the foundry environment." 

The Purion Platform
The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield.  On this platform, we've built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for your fab. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Shield™ Contamination Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.  The platform's superior spot beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ high energy implanter.

Forward Looking Statements:
The statements in this press release regarding Axcelis' expectations for shipment, installation and use of a system are each a "forward-looking statement." While they express the current expectations of Axcelis management, certain risks and uncertainties could cause actual results to differ materially from those currently anticipated. Among other factors, such risks and uncertainties include the right of a customer to cancel an order, or delay shipment or installation for a variety of reasons that may be outside of the Company's control. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.