Axcelis Announces Purion Platform Showcase At SEMICON Korea 2016
Axcelis Purion Showcase:
Korean chip manufacturers are invited to visit the Axcelis Purion Showcase at Booth #5504 in Hall D to learn firsthand about the technical and manufacturing breakthroughs of the industry's first complete implant platform designed specifically for the advanced planar and 3D devices. This includes:
- Purion XE™, the industry standard for high energy implant. This product includes a new extended energy range option to perform ultra-high energy implants. This new option was developed specifically to address the emerging needs of the image sensor, power device and NAND markets.
- Purion H™ high current implanter, with the fastest growing market share of any implanter in
Axcelis history. It features the industry's most advanced scanned spot beam technology which enables precise control of damage engineering and enhanced device performance. - Purion M™ mid current implanter, which now includes new capabilities to handle 150mm to 300mm wafers as well as multiple substrates for specialty device manufacturing. In addition, the Purion M's 'green design' ensures the industry's lowest level of power consumption for reduced environmental impact and lower operating costs.
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