Axcelis Receives Follow On Orders For 'Purion XE' From Multiple Foundries In Asia Pacific Region
Executive Vice President, Customer Operations
The Company recently introduced several high energy product line extensions, including the Purion EXE and VXE, to provide customers with the capability to perform ultra-high energy implants. The applications for these implants continue to expand in the specialty device market. All systems are available in both 200 and 300mm configurations.
The Purion Platform
The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield. On this platform,
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