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Axcelis Announces A Multiple System Order Of 'Purion XE' From Leading Chip Manufacturer In Asia Pacific
Systems Will Support Both 300mm Memory and 200mm Mature Process Technology Across Multiple Fabs

BEVERLY, Mass., March 14, 2017 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received orders for multiple Purion XE™ high energy systems from a leading chip manufacturer in the Asia Pacific region.  The new systems will be deployed across multiple fabs and will be used to support high volume production of 300mm memory and 200mm mature process technology. The systems are scheduled to ship in the first quarter.

Executive Vice President, Customer Operations John Aldeborgh commented, "We're very pleased about this new order.  This order, combined with the recent closure of the Purion M evaluation, allows our customer to utilize the complete Purion platform across multiple fabs and multiple applications, including 3D NAND, DRAM, and mature process technologies to meet the growing demands of the mobile and IoT markets."

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at


Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.