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Board of Directors

Board of Directors

Mary G. Puma

Executive Chairperson, Axcelis Technologies, Inc.

Tzu-Yin Chiu

Retired CEO, Semiconductor Manufacturing International Corporation

Member of the Nominating and Governance Committee

Member of the Technology Committee

Gregory B. Graves

Former CFO Entegris, Inc.

Member of the Audit Committee

Member of the Compensation Committee

Joseph P. Keithley

Former Chairman, Nordson Corporation and Former Chairman and CEO, Keithley Instruments

Member of the Audit Committee

Chair of the Nominating and Governance Committee

John T. Kurtzweil

Former CFO, Akoustis Technologies, Inc.

Chair of the Audit Committee

Member of the Compensation Committee

Russell Low, PhD

President and Chief Executive Officer, Axcelis Technologies, Inc.

Jeanne Quirk

Senior Vice President, Mergers and Acquisitions, TE Connectivity

Member of the Audit Committee

Member of the Nominating and Governance Committee

Thomas St. Dennis

Non Executive Chairman, FormFactor, Inc.

Member of the Nominating and Governance Committee

Chair of the Technology Committee

Necip Sayiner

Former President of Renesas Electronics America

Member of the Technology Committee

Member of the Compensation Committee

Jorge Titinger

Former President and CEO, Silicon Graphics International Corp.

Lead Director

Member of the Audit Committee

Chair of the Compensation Committee

Dipti Vachani

Senior Vice President, General Manager, Automotive and Embedded Line of Business, Arm Limited

Member of the Technology Committee

Member of the Compensation Committee

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