| You can quickly assemble your own Investor Kit by selecting and printing from the following documents. To order printed materials, or request additional investor-related information, complete an information request. |
| Latest Investor Presentation |
| Earnings Release |
| Annual Report |
| Proxy |
| Form 10-K |
| Form 10-Q |
| You may also find news of interest to investors on our News Releases page. |

| 05/16/13 - 8:01 a.m. Axcelis Receives Significant Order For High Performance Upgrade From Leading Chip Manufacturer |
| 05/02/13 - 4:02 p.m. Axcelis Announces Financial Results for First Quarter 2013 |
| 04/30/13 - 8:01 a.m. Axcelis Extends Purion Platform With The Launch Of The Purion XE High Energy Implanter |
![]() | Webcast Q1 2013 Axcelis Technologies, Inc. Earnings Conference Call (Replay) 05/02/13 at 5:00 p.m. ET |
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