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Axcelis Announces Key Win For 200mm 'Purion H' High Current Implanter at Tower Jazz Foundry
Innovative System Will Be Used to Manufacture Specialty Devices in North American Foundry

BEVERLY, Mass., May 26, 2015 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received an order for a 200mm Purion H™ single wafer, high current implanter from TowerJazz Semiconductor. TowerJazz was the fastest growing foundry in 2014, according to recent data from IC Insights. The Purion H will support capacity expansions at their specialty logic fab in North America.  The system is scheduled to ship in the third quarter.

John Aldeborgh, executive vice president, customer operations, said, "We're very excited to announce this new Purion customer.  We look forward to supporting TowerJazz, one of the world's fastest growing foundries, as they expand their global footprint and manufacturing capacity."  He continued, "Growth in mobile, automotive and the internet of things markets has created a surge in demand for 200mm systems.  According to Gartner, the segment is projected to be 10-15% of the implant market for the next 5 years, providing a strong opportunity for share gains. The new 200mm Purion H allows chipmakers to manufacture with the lowest cost of ownership as well as the industry's most advanced implant technology."

The Purion Platform

The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield.   On this platform, we've built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for your fab. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.   The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE high energy implanter.

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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To view the original version on PR Newswire, visit:http://www.prnewswire.com/news-releases/axcelis-announces-key-win-for-200mm--purion-h-high-current-implanter-at-tower-jazz-foundry-300088263.html

SOURCE Axcelis Technologies, Inc.

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