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Axcelis Announces Multi System Order For 'Purion M' Implanter From Leading Power Device Manufacturer And Several Shipments To Specialty Device Chipmakers
System Features Innovative High Temperature Silicon Carbide Capability for the Power Device Market

BEVERLY, Mass., Sept. 13, 2016 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry,  announced today a multi system order for the Company's Purion M™ medium current implanter from a leading power device chipmaker, as well as the shipment of several Purion M systems to specialty device manufacturers. The systems feature Axcelis' innovative new solution for high temperature silicon carbide processing, and will be used in high volume production of power devices and specialty logic chips supporting automotive, mobile and the Internet of Things market spaces.  The systems are scheduled to ship in the third and fourth quarter.

Executive Vice President of Engineering and Marketing, Bill Bintz, commented, "Interest in the Purion M continues to grow as we extend its capabilities to meet the needs of key customers in emerging technologies. Utilizing an innovative beam line design coupled with proprietary source technology, the Purion M provides customers with an unmatched level of purity and precision with over 2X the productivity of competitive offerings."

John Aldeborgh, executive vice president, customer operations, added, "We're excited about building on our relationship with these customers in the medium current segment, and look forward to a close collaboration as they expand their manufacturing capabilities in these emerging markets. The Purion platform's common, flexible architecture has allowed us to extend our presence into these high growth market spaces, as evidenced by these new shipments."

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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To view the original version on PR Newswire, visit:http://www.prnewswire.com/news-releases/axcelis-announces-multi-system-order-for-purion-m-implanter-from-leading-power-device-manufacturer-and-several-shipments-to-specialty-device-chipmakers-300326198.html

SOURCE Axcelis Technologies, Inc.

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