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Axcelis Announces Follow-On Orders For 'Purion H' From Leading Memory Chipmaker In Asia Pacific
Systems Will Support Capacity Ramp for New DRAM Fab

BEVERLY, Mass., April 19, 2016 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received follow-on orders for the Purion H™ high current implanter from a leading manufacturer of memory devices in the Asia Pacific region. The systems will be used to support a capacity ramp for next generation DRAM products in their new fab. These systems shipped in the first quarter.

"This win is further evidence of the industry leading performance of the Purion H, and the increasing importance of providing exceptional doping precision for enhanced device performance and yields," said John Aldeborgh, executive vice president, customer operations. "Axcelis has developed a proven portfolio of implanters to help chipmakers meet these technical challenges, while providing superior total cost of ownership."

President and CEO Mary Puma commented, "We are executing well on our plan to grow our high current market share in 2016, by continuing to expand our Purion customer base in this market."

The Power of Purion
The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield.   On this platform, Axcelis has built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for our customers. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.   The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ and Purion VXE™ high energy implanters.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:
Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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To view the original version on PR Newswire, visit:http://www.prnewswire.com/news-releases/axcelis-announces-follow-on-orders-for-purion-h-from-leading-memory-chipmaker-in-asia-pacific-300253197.html

SOURCE Axcelis Technologies, Inc.

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