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Axcelis Wins Multi System Follow On Order For 'Purion XE' High Energy Implanter
Innovative System Will Be Used in High Volume Production of Advanced NAND Devices

BEVERLY, Mass., June 23, 2015 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received a multi system, follow on order for the Purion XE™ high energy implanter from a major chipmaker in the Asia Pacific Region. The systems will be used to support a capacity expansion for 3D NAND Flash devices.  The systems are scheduled to ship in the third quarter. 

John Aldeborgh, executive vice president, customer operations, said, "We are very pleased to receive this follow on order and be the process tool of record for this fab.  The Purion XE is the most advanced high energy system available today, and was designed specifically to provide customers with absolute process precision and purity while delivering remarkable levels of capital efficiency." 

Bill Bintz, executive vice president, marketing and engineering, commented, "The advanced NAND segment, with its high level of capital intensity for high energy implanters, represents a significant opportunity for the Purion XE.  The Purion XE is ideally suited for this segment, since next generation 3D NAND processes demand more precise doping and angle control to ensure high levels of performance and yield, and the Purion XE excels at both of these challenges."

The Purion Platform
The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield.   On this platform, we've built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for your fab. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.   The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE high energy implanter.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.


Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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To view the original version on PR Newswire, visit:http://www.prnewswire.com/news-releases/axcelis-wins-multi-system-follow-on-order-for-purion-xe-high-energy-implanter-300102645.html

SOURCE Axcelis Technologies, Inc.


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