News Release

Axcelis Features Purion Platform Interactive Tour At SEMICON Korea 2017
Step Inside the New Industry Standard for Ion Implantation

BEVERLY, Mass., Feb. 7, 2017 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it will showcase its Purion™ Platform of ion implanters at SEMICON Korea 2017.  The event, one of the most important technology forums in the Asia Pacific region, is being held February 8-10, at the COEX Center in Seoul, Korea.  Axcelis will be located at Booth #5612 in Hall D.

Chip manufacturers are invited to step inside the Purion platform with an interactive 3D virtual tour where they can view the platform's significant technology and manufacturing advantages. This includes:

  • Purion XE™, the industry standard for high energy implant. This product line now includes the new Purion VXE™ and Purion EXE™ extended energy range options to perform ultra-high energy implants up to 8 MeV. These new models were developed specifically to address the emerging needs of the image sensor, power device and NAND markets.
  • Purion H™ high current implanter, which features the industry's most advanced scanned spot beam technology to enable precise control of damage engineering and enhanced device performance. It now includes the new Eterna ELS4, that delivers up to 50% improvement in lifetime and stability for lowest possible CoO.
  • Purion M™ mid current implanter, which features a unique hybrid filtration technology that eliminates energetic metallic contamination with same mass to charge ratio as implant species. The system handles 150mm to 300mm wafers as well as multiple substrates for specialty device manufacturing.

President and CEO Mary Puma, commented, "We're excited to be a part of this important growing   market, and to foster new opportunities for the Purion platform.  In 2017, Korea is forecasted to be a top spender in semiconductor fab equipment, as they support the demand for the burgeoning IoT, data storage and image sensor markets. The Purion platform is setting the new standard for ion implantation, and offers them significant advantages in precision technology and manufacturing capabilities."

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at


Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.