News Release

Axcelis Announces Orders For 'Purion H' And 'Purion M' From Leading Semiconductor Manufacturer
Third Chipmaker to Install the Complete Purion Platform to Leverage Industry's Most Advanced Implant Technology Across the Full Applications Space

BEVERLY, Mass., Feb. 21, 2017 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received orders for Purion H™ high current and the Purion M™ mid current implanters from a leading semiconductor manufacturer. This is the third major chipmaker to install the complete Purion Platform, and the first for non-memory applications. The Purion H and Purion M join the Purion XE™ which is already in high volume production at the customer site. The systems will ship in the first quarter.

Executive Vice President, Customer Operations John Aldeborgh, commented, "Our customer focused approach combined with our expanding portfolio of advanced technology has allowed us to expand our footprint at this leading chipmaker. This customer can now harness the full power of the Purion platform across the full spectrum of the implant applications space, to support their existing and emerging manufacturing requirements."

The Power of Purion
The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield.   On this platform, Axcelis has built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for our customers. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.   The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ and Purion VXE™ high energy implanters.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

 

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SOURCE Axcelis Technologies, Inc.