News Release

Axcelis Announces Placement of 'Purion VXE' at Leading Chipmaker in Asia Pacific
System for Next Gen R&D for Image Sensors to Support Mobile and IoT Market

BEVERLY, Mass., Feb. 28, 2017 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has placed a Purion VXE™, one of the new extended energy range models of Axcelis' industry leading Purion XE™ high energy implanter, at a leading chipmaker in Asia Pacific.  The new system delivers the highest energy range in the Purion platform. The chipmaker plans to use the Purion VXE to support R&D for image sensors and next generation device development. The system will ship in the first quarter.

Executive Vice President, Customer Operations John Aldeborgh commented, "Our new application specific product extensions were designed to address the exact needs of customers producing image sensors, power devices and memory devices. Both the Purion EXE™ and Purion VXE provide the highest energy levels available in a production implanter, to perform ultra-high energy implants required for these applications, with extremely precise and deep doping profiles."

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at


Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.