News Release

Axcelis Announces Multiple Follow On Orders For Purion Products From Several Chip Makers In AP Region
Systems Will Be Used to Manufacture 3D NAND, DRAM and Mature Logic Devices

BEVERLY, Mass., May 22, 2017 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received multiple follow on orders for the Purion H™ high current and Purion XE™ high energy system from several leading chip manufacturers in the Asia Pacific Region.  These orders include both 200 and 300mm systems that will support high volume production of 3D NAND, DRAM and mature logic devices to support the expanding IoT, mobile and data storage markets. The systems will ship in the second quarter.

Executive Vice President, Customer Operations John Aldeborgh commented, "We're pleased to support our customers as they expand their manufacturing capabilities to support growth across DRAM, 3D NAND and mature market segments."

President and CEO Mary Puma commented, "Continued strength in mobile, IoT and China has created demand for both 200 and 300mm systems. The Purion platform's flexible architecture allows us to meet the needs of both emerging and mature device technology, while simultaneously delivering exceptional reliability and capital efficiency."

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552


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SOURCE Axcelis Technologies, Inc.