News Release

Axcelis Announces Multiple Orders For 'Purion H' Including Successful Closure Of An Evaluation
Strength in Memory and Mature Technologies Drives New Penetrations and Follow On Business

BEVERLY, Mass., Sept. 7, 2017 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received orders for the Purion H™ high current system from multiple leading chip manufacturers. The 200 and 300mm system orders include a new foundry penetration and the successful completion of a tool evaluation with follow on business to the same memory customer. The systems will support high volume production of DRAM and mature devices. All of the systems have shipped.

Executive Vice President, Customer Operations John Aldeborgh commented, "We're very excited about the potential of these new wins and the strong momentum of the Purion platform. The DRAM and mature technology segments remain very strong, fueled by continued growth in data storage and IoT."

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.