News Release

Axcelis Announces Multiple 'Purion XE' Orders From Leading Chip Makers In China And AP Region
Systems Will Support 3D NAND, Mature Logic, and Image Sensor Device Production

BEVERLY, Mass., Sept. 27, 2017 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received multiple follow on orders as well as two new fab penetrations for the Purion XE™ high energy implanter from several leading chip manufacturers in China and the Asia Pacific region.  These orders include both 200 and 300mm systems that will support high volume production of 3D NAND, mature logic and image sensor devices. The systems shipped in the third quarter.

Executive Vice President, Customer Operations John Aldeborgh commented, "We're pleased to support our customers as they invest in additional manufacturing capacity to support the rapidly growing IoT, mobile and data storage markets.  We are proud of our leadership position in high energy implant, which we have achieved by addressing the industry's evolving needs with superior technology, manufacturing flexibility and cost of ownership."

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.