News Release

Axcelis Announces New 'Purion H' Order From Leading Advanced Logic Chip Maker
Purion H Will Be Used for Next Generation, Sub 10nm Logic Devices

BEVERLY, Mass., March 20, 2018 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has penetrated a new customer with the Purion H™ high current system with an order from a leading advanced logic chip manufacturer. The Purion H will be used to develop and manufacture sub 10nm logic devices.  The system shipped in the first quarter. 

Executive Vice President, Customer Operations John Aldeborgh commented, "This is a significant win for Axcelis. The Purion H was selected over competitive systems for the customer's next generation technology, because of the significant technological advantages delivered by the Purion platform's innovative architecture, unmatched process control and advanced thermal capabilities. We look forward to working with this customer as they ramp their new processes."

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for 40 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:
Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.