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Axcelis Announces Multiple 'Purion VXE' Orders Including Successful Closure of Tool Evaluation
Systems Will Support Image Sensor Device Ramp in Asia Pacific Region to Support Growing Mobile and IoT Markets

BEVERLY, Mass., Oct. 18, 2017 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today the successful completion of a Purion VXE™ high energy tool evaluation, as well as additional orders from multiple customers. A recent addition to the Axcelis high energy product line, the Purion VXE delivers the highest energy range in the Purion platform. These systems will support high volume production of image sensor devices at leading chip manufacturers in the Asia Pacific region. Revenue for the systems was recognized in the third quarter.

Executive Vice President, Customer Operations John Aldeborgh commented, "With the addition of the Purion VXE to the Purion product family, Axcelis has created a product that is ideally suited to address the exact needs of customers manufacturing image sensors for applications requiring ultra-high energy implants with extremely precise and deep doping profiles. The demand for products requiring these implants continues to expand in the growing IoT and mobile markets, providing strong opportunities for growth for the Purion platform and extending Axcelis' leadership position in high energy implant."

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS: 
Maureen Hart (editorial/media) 978.787.4266 
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.