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Annual Meeting Info

Annual Reports | Annual Meeting Info
Proxy Materials

The annual meeting of stockholders will be held at 12:30 p.m. on Tuesday, May 16, 2017 at the offices of Locke Lord LLP, 111 Huntington Ave., Boston, MA 02199-7613.


2017 Notice of Annual Meeting and Proxy Statement
2016 Annual Report to Stockholders

Electronic Delivery  

As an Axcelis stockholder, you can receive future Axcelis proxy statements, annual reports to stockholders, and related proxy materials via electronic delivery, rather than receiving hard copies in the mail. Choosing to receive your future proxy materials online will save us the cost of producing and mailing documents to you and help conserve natural resources.

Click here for Electronic Delivery Enrollment

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