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Proxy Materials

Annual Reports | Proxy Materials
Proxy Materials

The annual meeting of stockholders will be held at 1:00 p.m. on Wednesday, May 4, 2016 at the offices of Locke Lord LLP, 111 Huntington Ave., Boston, MA 02199-7613.


2016 Notice of Annual Meeting and Proxy Statement
Supplemental Proxy Material Filed April 11, 2016
Supplemental Proxy Material Filed April 4, 2016
2015 Annual Report to Stockholders

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As an Axcelis stockholder, you can receive future Axcelis proxy statements, annual reports to stockholders, and related proxy materials via electronic delivery, rather than receiving hard copies in the mail. Choosing to receive your future proxy materials online will save us the cost of producing and mailing documents to you and help conserve natural resources.

Click here for Electronic Delivery Enrollment

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