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Annual Report and Proxy

The Financial Reports on this page do not include all filings made by Axcelis with the Securities and Exchange Commission. For access to all SEC filings made by Axcelis, as well as EDGAR filings by Axcelis insiders, see “SEC Filings by Axcelis and Insiders”.
Annual Reports | Proxy Materials

2016  |  2015  |  2014  |  2013  |  2012  |  2011  | 2010  | 2009  | 2008  | 2007  | 2006  | 2005  | 2004  | 2003  | 2002  | 2001  | 2000

DateYearTitle 
11/4/20162016
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Supplemental Proxy Material Filed April 11, 2016
4/4/20162016
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Supplemental Proxy Material Filed April 4, 2016
16/3/20162015
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2015 Annual Report
16/3/20162016
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2016 Notice of Annual Meeting and Proxy Statement
25/3/20152015
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2015 Notice of Annual Meeting and Proxy Statement
25/3/20152014
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2014 Annual Report
25/3/20142014
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2014 Notice of Annual Meeting and Proxy Statement
25/3/20142013
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2013 Annual Report
26/3/20122012
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2012 Annual Report
23/3/20122012
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2012 Notice of Annual Meeting and Proxy Statement
23/3/20112011
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2011 Annual Report
15/3/20112011
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Proxy Statement
18/3/20102010
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Proxy Statement
15/3/20102010
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2010 Annual Report
18/3/20092009
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2009 Annual Report
3/3/20092009
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Proxy Statement
3/4/20082008
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2008 Annual Report
2/4/20082008
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Proxy Statement
13/5/20072007
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2007 Annual Report
2/3/20072007
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Proxy Statement
3/3/20062006
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2006 Annual Report
1/3/20062006
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Proxy Statement
18/4/20052005
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2005 Annual Report
4/4/20052005
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Proxy Statement
5/12/20042004
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2004 Annual Report
22/5/20042004
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Proxy Statement
22/5/20032003
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Annual Report
6/5/20032003
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Proxy Statement
6/5/20022002
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Annual Report
20/3/20022002
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Proxy Statement
31/12/20012001
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Annual Report
30/4/20012001
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Proxy Statement
31/12/20002001
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Annual Report
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RECENT NEWS

02/21/17 - 8:00 a.m.
Axcelis Announces Orders For 'Purion H' And 'Purion M' From Leading Semiconductor Manufacturer
02/07/17 - 8:01 a.m.
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02/01/17 - 4:01 p.m.
Axcelis Announces Financial Results For Fourth Quarter And Full Year 2016

RECENT EVENTS

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Axcelis Technologies, Inc. at the Needham 19th Annual Growth Conference (Replay)
01/10/17 at 12:00 p.m. ET
Axcelis Technologies, Inc. at the Needham 19th Annual Growth Conference
Tuesday, January 10, 2017  through Thursday, January 12, 2017 
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Axcelis Technologies, Inc. at the NobleCon13 (Replay)
01/30/17 at 12:00 p.m. ET
Axcelis Technologies, Inc. at the NobleCon13
Monday, January 30, 2017 12:00 p.m. ET  
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