Annual Report and Proxy

The Financial Reports on this page do not include all filings made by Axcelis with the Securities and Exchange Commission. For access to all SEC filings made by Axcelis, as well as EDGAR filings by Axcelis insiders, see “SEC Filings by Axcelis and Insiders”.
Annual Reports | Proxy Materials

2016  |  2015  |  2014  |  2013  |  2012  |  2011  | 2010  | 2009  | 2008  | 2007  | 2006  | 2005  | 2004  | 2003  | 2002  | 2001  | 2000

DateYearTitle 
05/04/172017
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Latest Investor Presentation
04/05/172016
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2016 Annual Report
04/11/162016
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Supplemental Proxy Material Filed April 11, 2016
04/04/162016
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Supplemental Proxy Material Filed April 4, 2016
03/16/162015
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2015 Annual Report
03/16/162016
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2016 Notice of Annual Meeting and Proxy Statement
03/25/152015
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2015 Notice of Annual Meeting and Proxy Statement
03/25/152014
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2014 Annual Report
03/25/142014
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2014 Notice of Annual Meeting and Proxy Statement
03/25/142013
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2013 Annual Report
03/26/122012
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2012 Annual Report
03/23/122012
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2012 Notice of Annual Meeting and Proxy Statement
03/23/112011
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2011 Annual Report
03/15/112011
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Proxy Statement
03/18/102010
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Proxy Statement
03/15/102010
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2010 Annual Report
03/18/092009
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2009 Annual Report
03/03/092009
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Proxy Statement
04/03/082008
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2008 Annual Report
04/02/082008
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Proxy Statement
05/13/072007
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2007 Annual Report
03/02/072007
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Proxy Statement
03/03/062006
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2006 Annual Report
03/01/062006
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Proxy Statement
04/18/052005
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2005 Annual Report
04/04/052005
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Proxy Statement
12/05/042004
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2004 Annual Report
05/22/042004
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Proxy Statement
05/22/032003
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Annual Report
05/06/032003
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Proxy Statement
05/06/022002
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Annual Report
03/20/022002
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Proxy Statement
12/31/012001
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Annual Report
04/30/012001
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Proxy Statement
12/31/002000
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Annual Report
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