Mary G. Puma
President and Chief Executive Officer
Mary Puma
Mary Puma has been Axcelis' Chairman since May of 2005 and CEO since January 2002. She played an instrumental role in the company's spin off from Eaton Corporation in 2000, when she was named president and chief operating officer. Puma joined the semiconductor business in 1998 when it was Eaton's Semiconductor Operation, first serving as the Vice President of its implant business and then as the Vice President for the total operation. Puma joined Eaton originally in May 1996 as the General Manager of the Commercial Controls Division. Prior to joining Eaton, she spent 15 years in various marketing and general management positions at five different General Electric business units. Puma holds a BA degree in Economics, Phi Beta Kappa, from Tufts University and a MS degree in Management from the MIT Sloan School of Management. She is a member of the boards of Nordson Corporation, North Shore Medical Center, and Semiconductor Equipment and Materials International (SEMI).
Kevin J. Brewer
Executive Vice President and Chief Financial Officer
Kevin Brewer

Executive Vice President and Chief Financial Officer, Kevin J. Brewer plays a central role in driving operational efficiencies, improving financial performance, and increasing the Company’s pace of profitable growth. In addition to managing the Axcelis finance organization, Mr. Brewer also oversees manufacturing, supply chain and logistics at Axcelis.


Until assuming the role of CFO, Mr. Brewer held the position of Executive Vice President, Global Operations. Prior to joining Axcelis in 1999, Mr. Brewer was Director of Operations, Business Jets, at Raytheon Aircraft Company. Brewer also held various management positions in operations and strategic planning in Raytheon Company’s Electronic Systems and Missile Systems groups. Brewer holds a BS degree in Mechanical Engineering Technology from Southeastern Massachusetts University, and a Master’s degree in Business Administration from New Hampshire College. Mr. Brewer was named 2016 CFO of the Year in the public company category by the Boston Business Journal (BBJ). The award recognizes the top chief financial officers who deliver the most outstanding performance for their Massachusetts companies.

Bill Bintz
Executive Vice President, Product Development
Bill Bintz
Bill Bintz has been Executive Vice President of Engineering and Marketing since April 2011, prior to which he was Senior Vice President, Marketing since September 2007. Bintz joined Axcelis in early 2006 as Director of Marketing for curing and cleaning products and shortly thereafter became Vice President of Product Marketing where he expanded his responsibilities to include implant products as well. Prior to joining Axcelis, from 2002 Bintz was Product Director for Medium Current and High Energy Ion Implant Systems at Varian Semiconductor Equipment Associates, Inc. Before that, he was General Manager of the Materials Delivery Products Group at MKS Instruments, beginning in 1999, and General Manager of the Thermal Processing Systems Division at Eaton Corporation (now Axcelis) beginning in 1995. Bintz holds a BS in Mechanical Engineering and MS in Electrical Engineering from Northeastern University.
Lynnette C. Fallon
Executive Vice President, Human Resources and Legal, General Counsel
Lynnette Fallon
Lynnette Fallon oversees Axcelis' legal and human resources operations, and also serves as Axcelis' corporate secretary. She joined Axcelis in April 2001 as senior vice president and general counsel. Previously, Fallon spent nearly a decade as a partner in the Boston law firm of Palmer & Dodge LLP, where she was head of the Business Law Department from 1997 to 2001. Fallon holds a bachelor's degree from Vassar College and received her JD from Boston University School of Law.
Douglas A. Lawson
Executive Vice President, Corporate Marketing and Strategy
Douglas Lawson
Doug Lawson oversees all corporate marketing operations and strategy development for Axcelis Technologies. Before assuming this role, Mr. Lawson held the position of Senior Vice President of Strategic Initiatives. Prior to joining the company in 2011, he held the position of General Manager of Luminus Devices. He has over 25 years of experience in the technology industry, and has held numerous executive and technical positions at BTU International, PRI Automation, Digital Equipment and Intel. Doug holds a BS degree in Chemical Engineering from University of Lowell, as well as an MS degree in Manufacturing Engineering and an MBA from Boston University.
Russell Low, PhD
Executive Vice President, Global Customer & Engineering Operations
Russell Low, PhD
Dr. Russell Low became Axcelis’ Executive Vice President, Global Customer and Engineering Operations effective January 1, 2021, having served as Executive Vice President, Engineering since joining Axcelis in October 2016.  Prior to joining the Company, Dr. Low held the position of Vice President of Engineering, MOCVD Business Unit at Veeco Instruments since 2013, prior to which he was Veeco’s Senior Director of Engineering, Molecular Beam Epitaxy Business Unit beginning in 2012. From 2003 to 2012, Dr. Low held a number of positions at Varian Semiconductor Equipment Associates, most recently as Director of Technology. Prior to that, Dr. Low held engineering positions in the thermal processing and ion implant divisions of Applied Materials, Inc. Dr. Low received his Ph.D. in Physical Chemistry from Oxford University. He also holds an Executive MBA from the Massachusetts Institute of Technology, and a BS degree from Southampton University. He has 44 granted US patents over multiple categories and has authored over 20 refereed papers.