Axcelis Announces Shipments of 'Purion Dragon' and 'Purion XEmax'
President and CEO
"The new Purion XEmax high energy implanter was designed for emerging, high performance image sensor applications," Bintz continued. "The enhanced beamline features multiple filtration systems to eliminate energetic metal contaminants which can otherwise result in compromised dark current and white pixel count levels.. The new system is built on the industry leading Purion XE high energy implant platform and features
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