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Document and Entity Information - shares	3 Months Ended
Document and Entity Information - shares	Mar. 31, 2014	Apr. 30, 2014
Document and Entity Information
Entity Registrant Name	AXCELIS TECHNOLOGIES INC
Entity Central Index Key	0001113232
Document Type	10-Q
Document Period End Date	Mar. 31, 2014
Amendment Flag	false
Current Fiscal Year End Date	--12-31
Entity Current Reporting Status	Yes
Entity Filer Category	Accelerated Filer
Entity Common Stock, Shares Outstanding		111,202,573
Document Fiscal Year Focus	2014
Document Fiscal Period Focus	Q1

Consolidated Statements of Operations - USD ($) shares in Thousands, $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Revenue
Product	$ 55,015	$ 34,452
Services	5,825	6,274
Total revenue	60,840	40,726
Cost of revenue
Product	33,802	22,181
Services	5,298	5,602
Total cost of revenue	39,100	27,783
Gross profit	21,740	12,943
Operating expenses
Research and development	9,257	9,206
Sales and marketing	5,476	5,201
General and administrative	6,481	6,590
Gain on sale of dry strip assets and intellectual property		(368)
Restructuring charges	200	1,801
Total operating expenses	21,414	22,430
Income (loss) from operations	326	(9,487)
Other income (expense)
Interest income	2	3
Interest expense	(251)
Other, net	292	829
Total other income	43	832
Income (loss) before income taxes	369	(8,655)
Income taxes	195	333
Net income (loss)	$ 174	$ (8,988)
Net earnings (loss) per share
Basic (in dollars per share)	$ 0.00	$ (0.08)
Diluted (in dollars per share)	$ 0.00	$ (0.08)
Shares used in computing net earnings (loss) per share
Basic weighted average common shares	110,649	108,227
Diluted weighted average common shares	115,798	108,227

Consolidated Statements of Comprehensive Loss - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Consolidated Statements of Comprehensive Loss
Net income (loss)	$ 174	$ (8,988)
Other comprehensive income (loss):
Foreign currency translation adjustments	(677)	(2,078)
Amortization of actuarial losses from pension plan	6	8
Comprehensive loss	$ (497)	$ (11,058)

Consolidated Balance Sheets - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Current assets
Cash and cash equivalents	$ 43,039	$ 46,290
Accounts receivable, net	38,121	36,587
Inventories, net	95,533	95,789
Prepaid expenses and other current assets	7,476	6,242
Total current assets	184,169	184,908
Property, plant and equipment, net	31,605	32,006
Long-term restricted cash	825	825
Other assets	16,104	15,810
Total assets	232,703	233,549
Current liabilities
Accounts payable	17,865	19,451
Accrued compensation	4,692	4,845
Warranty	1,496	1,316
Income taxes	474	417
Deferred revenue	3,836	4,387
Current portion of long-term debt	762	471
Other current liabilities	4,100	4,573
Total current liabilities	33,225	35,460
Long-term debt	14,238	14,529
Long-term deferred revenue	257	322
Other long-term liabilities	7,058	7,236
Total liabilities	54,778	57,547
Commitments and contingencies (Note 13)
Stockholders' equity
Preferred stock, $0.001 par value, 30,000 shares authorized; none issued or outstanding
Common stock, $0.001 par value, 300,000 shares authorized; 111,269 shares issued and 111,149 shares outstanding at March 31, 2014;110,225 shares issued and 110,105 shares outstanding at December 31, 2013	111	110
Additional paid-in capital	513,411	510,992
Treasury stock, at cost, 120 shares at March 31, 2014 and December 31, 2013	(1,218)	(1,218)
Accumulated deficit	(339,447)	(339,621)
Accumulated other comprehensive income	5,068	5,739
Total stockholders' equity	177,925	176,002
Total liabilities and stockholders' equity	$ 232,703	$ 233,549

Consolidated Balance Sheets (Parenthetical) - $ / shares shares in Thousands	Mar. 31, 2014	Dec. 31, 2013
Consolidated Balance Sheets
Preferred stock, par value (in dollars per share)	$ 0.001	$ 0.001
Preferred stock, shares authorized	30,000	30,000
Preferred stock, shares issued	0	0
Preferred stock, shares outstanding	0	0
Common stock, par value (in dollars per share)	$ 0.001	$ 0.001
Common stock, shares authorized	300,000	300,000
Common stock, shares issued	111,269	110,225
Common stock, shares outstanding	111,149	110,105
Treasury stock, shares	120	120

Consolidated Statements of Cash Flows - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Cash flows from operating activities
Net income (loss)	$ 174	$ (8,988)
Adjustments to reconcile net income (loss) to net cash used for operating activities:
Depreciation and amortization	1,140	1,394
Gain on sale of dry strip assets and intellectual property		(368)
Deferred taxes	312	56
Stock-based compensation expense	1,172	839
Provision for excess inventory	59	2,211
Changes in operating assets & liabilities
Accounts receivable	(1,634)	1,458
Inventories	(52)	(1,672)
Prepaid expenses and other current assets	(1,252)	(544)
Accounts payable and other current liabilities	(2,025)	5,043
Deferred revenue	(614)	(843)
Income taxes	61	84
Other assets and liabilities	(1,304)	(549)
Net cash used for operating activities	(3,963)	(1,879)
Cash flows from investing activities
Proceeds from sale of dry strip assets and intellectual property		400
Expenditures for property, plant, and equipment	(227)	(150)
Decrease in restricted cash		3
Net cash (used for) provided by investing activities	(227)	253
Cash flows from financing activities
Proceeds from exercise of stock options	1,277	49
Net cash provided by financing activities	1,277	49
Effect of exchange rate changes on cash	(338)	(968)
Net decrease in cash and cash equivalents	(3,251)	(2,545)
Cash and cash equivalents at beginning of period	46,290	44,986
Cash and cash equivalents at end of period	$ 43,039	$ 42,441

Nature of Business	3 Months Ended
Nature of Business	Mar. 31, 2014
Nature of Business
Nature of Business	Note 1. Nature of Business Axcelis Technologies, Inc. (“Axcelis” or the “Company”) was incorporated in Delaware in 1995, and is a worldwide producer of ion implantation and other processing equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition, the Company provides extensive aftermarket service and support, including spare parts, equipment upgrades, and maintenance services to the semiconductor industry. The accompanying unaudited consolidated financial statements have been prepared in accordance with U.S. generally accepted accounting principles for interim financial information and with the instructions to Form 10-Q and Article 10 of Regulation S-X. Accordingly, they do not include all of the information and footnotes required by generally accepted accounting principles for complete financial statements. In the opinion of management, all adjustments which are of a normal recurring nature and considered necessary for a fair presentation of these financial statements have been included. Operating results for the interim periods presented are not necessarily indicative of the results that may be expected for other interim periods or for the year as a whole. The balance sheet at December 31, 2013 has been derived from the audited financial statements at that date but does not include all of the information and footnotes required by generally accepted accounting principles for complete financial statements. For further information, refer to the consolidated financial statements and footnotes thereto included in Axcelis Technologies, Inc.’s Annual Report on Form 10-K for the year ended December 31, 2013.

- Definition

The entire disclosure for organization, consolidation and basis of presentation of financial statements disclosure.

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+ Details

Stock-Based Compensation	3 Months Ended
Stock-Based Compensation	Mar. 31, 2014
Stock-Based Compensation
Stock-Based Compensation	Note 2. Stock-Based Compensation The Company maintains the Axcelis Technologies, Inc. 2012 Equity Incentive Plan (the “2012 Equity Plan”), which became effective on May 2, 2012, and permits the issuance of options, restricted stock, restricted stock units and performance awards to selected employees, directors and consultants of the Company. The Company’s 2000 Stock Plan (the “2000 Stock Plan”), expired on May 1, 2012 and no new grants may be made under that plan after that date. However, awards granted under the 2000 Stock Plan prior to the expiration remain outstanding and subject to the terms of the 2000 Stock Plan. The Company also maintains the Axcelis Technologies, Inc. Employee Stock Purchase Plan (the “ESPP”), an Internal Revenue Code Section 423 plan. The 2012 Equity Plan and the ESPP are more fully described in Note 13 to the consolidated financial statements in the Company’s 2013 Annual Report on Form 10-K. The Company recognized stock-based compensation expense of $1.2 million and $0.8 million for the three-month periods ended March 31, 2014 and 2013, respectively. These amounts include compensation expense related to restricted stock units, non-qualified stock options and stock to be issued to participants under the ESPP.

Gain on Sale of Dry Strip Assets and Intellectual Property	3 Months Ended
	Mar. 31, 2014
Gain on Sale of Dry Strip Assets and Intellectual Property
Gain on Sale of Dry Strip Assets and Intellectual Property	Note 3. Gain on Sale of Dry Strip Assets and Intellectual Property In December 2012, the Company sold its dry strip assets and intellectual property to Lam Research Corporation (Lam). A portion of the purchase consideration ($2.0 million) was contingent upon the Company achieving certain milestones. During the first quarter of 2013, the Company recorded $0.4 million for the proceeds received based on its achievement of a milestone. This amount was partially offset by additional costs associated with a lab system purchased by Lam. The Company is no longer eligible to achieve additional milestones.

Computation of Net Earnings (Loss) per Share

3 Months Ended

Mar. 31, 2014

Computation of Net Earnings (Loss) per Share

Computation of Net Earnings (Loss) per Share

Note 4. Computation of Net Earnings (Loss) per Share

Basic earnings (loss) per share is computed by dividing income (loss) available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings (loss) per share is similar to basic earnings (loss) per share, except that the denominator is increased to include the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method.

The components of net earnings (loss) per share are as follows:

	Three months ended March 31,
	2014		2013
	(in thousands, except per share data)
Net income (loss) available to common stockholders	$	174	$	(8,988	)

Weighted average common shares outstanding used in computing basic net earnings (loss) per share	110,649		108,227
Incremental options, RSUs and restricted stock	5,149		—
Weighted average common shares outstanding used in computing diluted net earnings (loss) per share	115,798		108,227
Net earnings (loss) per share
Basic	$	0.00	$	(0.08	)
Diluted	$	0.00	$	(0.08	)

The Company incurred a net loss for the three-month period ended March 31, 2013, and excluded 2,103,634 incremental shares attributable to outstanding stock options, restricted stock and restricted stock units from the calculation of net loss per share because the effect would have been anti-dilutive.

Accumulated Other Comprehensive Income

3 Months Ended

Mar. 31, 2014

Accumulated Other Comprehensive Income

Accumulated Other Comprehensive Income

Note 5. Accumulated Other Comprehensive Income

The following table displays the changes in accumulated other comprehensive income, net of tax, by component for the three months ended March 31, 2014:

	Foreign currency			Defined benefit pension plan			Total
	(in thousands)
Balance at December 31, 2013	$	6,070		$	(331	)	$	5,739
Other comprehensive loss before reclassifications	(677		)	—			(677		)
Amounts reclassified from accumulated other comprehensive loss (1)	—			6			6
Net current-period other comprehensive income (loss)	(677		)	6			(671		)
Balance at March 31, 2014	$	5,393		$	(325	)	$	5,068

(1) Amount presented before taxes as the tax effect is not material to the consolidated financial statements.

- Definition

The entire disclosure for comprehensive income, which includes, but is not limited to, 1) the amount of income tax expense or benefit allocated to each component of other comprehensive income, including reclassification adjustments, 2) the reclassification adjustments for each classification of other comprehensive income and 3) the ending accumulated balances for each component of comprehensive income.

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+ Details

Inventories, net

3 Months Ended

Mar. 31, 2014

Inventories, net

Inventories, net

Note 6. Inventories, net

The components of inventories are as follows:

	March 31,		December 31,
	2014		2013
	(in thousands)
Raw materials	$	57,809	$	56,942
Work in process	29,064		27,462
Finished goods (completed systems)	$	8,660	11,385
	$	95,533	$	95,789

When recorded, inventory reserves are intended to reduce the carrying value of inventories to their net realizable value. The Company establishes inventory reserves when conditions exist that indicate inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for the Company’s products or market conditions. The Company regularly evaluates the ability to realize the value of inventories based on a combination of factors including the following: forecasted sales or usage, estimated product end of life dates, estimated current and future market value and new product introductions. Purchasing and usage alternatives are also explored to mitigate inventory exposure. As of March 31, 2014 and December 31, 2013, inventories are stated net of inventory reserves of $24.6 million and $25.1 million respectively.

During the three months ended March 31, 2013, the Company recorded a charge to cost of sales of $2.1 million for 300mm dry strip components. Under the terms of the agreement with Lam, the Company was permitted to manufacture and sell dry strip products through September 2013. Due to changes in the forecasted sales of the Company’s dry strip products that become known in the current period, a portion of the dry strip inventory components were determined to be non-recoverable.

During the three months ended March 31, 2013, the Company recorded a charge to cost of sales of $0.5 million due to production levels below normal capacity. There were no similar charges recorded for the three months ended March 31, 2014.

Restructuring Charges

3 Months Ended

Mar. 31, 2014

Restructuring Charges.

Restructuring Charges

Note 7. Restructuring Charges

During 2013 the Company initiated reductions in force to control costs and improve the focus of its operations in order to achieve future profitability and conserve cash. As of December 31, 2013, less than $0.1 million of these costs were accrued and unpaid. During the three months ended March 31, 2014, the Company implemented further actions, which resulted in restructuring charges for severance and related costs of $0.2 million being recorded. The liability at March 31, 2014 of $0.1 million is expected to be paid primarily in the second quarter of 2014.

Changes in the Company’s restructuring liability, which consists primarily of severance and related costs, included in amounts reported as other current liabilities, are as follows:

	(In thousands)
Balance at December 31, 2013	$	43
Severance and related costs	200
Cash payments	(122		)
Balance at March 31, 2014	$	121

Product Warranty

3 Months Ended

Mar. 31, 2014

Product Warranty

Product Warranty

Note 8. Product Warranty

The Company generally offers a one year warranty for all of its systems, the terms and conditions of which vary depending upon the product sold. For all systems sold, the Company accrues a liability for the estimated cost of standard warranty at the time of system shipment and defers the portion of systems revenue attributable to the fair value of non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect the Company’s warranty liability include the number of installed units, historical and anticipated product failure rates, material usage and service labor costs. The Company periodically assesses the adequacy of its recorded liability and adjusts the amount as necessary.

The changes in the Company’s product warranty liability are as follows:

	Three months ended March 31,
	2014			2013
	(in thousands)
Balance at January 1 (beginning of year)	$	1,428		$	1,801
Warranties issued during the period	647			457
Settlements made during the period	(467		)	(399		)
Changes in estimate of liability for pre-existing warranties during the period	12			(277		)
Balance at March 31 (end of period)	$	1,620		$	1,582
Amount classified as current	$	1,496		$	1,539
Amount classified as long-term	124			43
Total warranty liability	$	1,620		$	1,582

Fair Value Measurements

3 Months Ended

Mar. 31, 2014

Fair Value Measurements

Fair Value Measurements

Note 9. Fair Value Measurements

Certain of the assets and liabilities on the Company’s balance sheets are reported at their “fair value”. Fair value is defined as the exchange price that would be received for an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date.

(a) Fair Value Hierarchy

The accounting guidance for fair value measurement requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The standard establishes a fair value hierarchy based on the level of independent, objective evidence surrounding the inputs used to measure fair value. A financial instrument’s categorization within the fair value hierarchy is based upon the lowest level of input that is significant to the fair value measurement. The fair value hierarchy is as follows:

Level 1 applies to assets or liabilities for which there are quoted prices in active markets for identical assets or liabilities.

Level 2 applies to assets or liabilities for which there are inputs other than quoted prices that are observable for the asset or liability, such as quoted prices for similar assets or liabilities in active markets; quoted prices for identical assets or liabilities in markets with insufficient volume or infrequent transactions (less active markets); or model-derived valuations in which significant inputs are observable or can be derived principally from, or corroborated by, observable market data.

Level 3 applies to assets or liabilities for which there are unobservable inputs to the valuation methodology that are significant to the measurement of the fair value of the assets or liabilities.

(b) Fair Value Measurements

The Company’s money market funds are included in cash and cash equivalents in the consolidated balance sheets, and are considered a level 1 investment as they are valued at quoted market prices in active markets. The Company’s term loan is carried at amortized cost which approximates fair value based on current market pricing of similar debt instruments and is categorized as level 2 within the fair value hierarchy.

The following table sets forth the Company’s assets and liabilities by level within the fair value hierarchy:

	March 31, 2014 Fair Value Measurements
	Level 1		Level 2		Level 3		Total
	(in thousands)
Assets
Cash equivalents:
Money market funds	$	9,106	$	—	$	—	$	9,106
Liabilities
Term loan	$	—	$	15,000	$	—	$	15,000

	December 31, 2013 Fair Value Measurements
	Level 1		Level 2		Level 3		Total
	(in thousands)
Assets
Cash equivalents:
Money market funds	$	10,504	$	—	$	—	$	10,504
Liabilities
Term loan	$	—	$	15,000	$	—	$	15,000

(c) Other Financial Instruments

The carrying amounts reflected in the consolidated balance sheets for cash and cash equivalents (which are comprised primarily of deposit and overnight sweep accounts), accounts receivable, prepaid expenses and other current and non-current assets, restricted cash, accounts payable and accrued expenses approximate fair value due to their short-term maturities.

- Definition

The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information.

+ References + Details

Financing Arrangements	3 Months Ended
Financing Arrangements	Mar. 31, 2014
Financing Arrangements
Financing Arrangements	Note 10. Financing Arrangements Term Loan The Company has a Business Loan Agreement dated July 5, 2013 with Northern Bank & Trust Company which provides for a three year term loan of $15.0 million secured by the Company’s real estate in Beverly, Massachusetts. The loan bears interest at 5.5% per annum, with payments of principal beginning August 5, 2014. Interest is payable monthly. All outstanding principal and interest on the term loan is due and payable on July 5, 2016. The Company’s financial results for the quarter ended March 31, 2014 caused the Company not to meet the Debt Service Ratio covenant in the Business Loan Agreement, which covenant was waived by Northern Bank & Trust Company. In addition, the parties have entered into a letter agreement as of May 2, 2014, which amended the Debt Service Ratio covenant to defer its effectiveness until September 30, 2014. The Company was in compliance with all other covenants associated with the term loan during the first quarter of 2014. Credit Facility The Company has a revolving credit facility with Silicon Valley Bank dated October 31, 2013. Under this revolving credit facility, the Company has the ability to borrow up to $10.0 million on a revolving basis during its two year term. The Company’s ability to borrow under this line of credit is limited to 80% of the then current amount of qualified accounts receivable. At March 31, 2014, the Company’s available borrowing capacity under the revolving credit facility was $8.9 million. There were no borrowings against this facility during the three months ended March 31, 2014. The Company was in compliance with all covenants associated with the credit facility during the first quarter of 2014.

Income Taxes	3 Months Ended
Income Taxes	Mar. 31, 2014
Income Taxes
Income Taxes	Note 11. Income Taxes Income tax expense relates principally to operating results of foreign entities in jurisdictions, primarily in Europe and Asia, where the Company earns taxable income. The Company has significant net operating losses in the United States and certain other tax jurisdictions and, as a result, does not pay significant income taxes in those jurisdictions. As of December 31, 2013, the Company’s valuation allowance related to income taxes was approximately $147.5 million. The Company is in a three year cumulative loss position in the United States. As a result, the Company maintains a 100% valuation allowance to reduce the carrying value of the related deferred tax assets to zero. The Company will continue to maintain a full valuation allowance for those tax assets until sustainable future levels of profitability are evident. The Financial Accounting Standards Board issued Accounting Standards Update (ASU) Number 2013-11 in July 2013 which requires that a reserve for an unrecognized tax benefit be presented as a reduction to a deferred tax asset for a net operating loss carryforward, a similar tax loss, or a tax credit carryforward with certain exceptions. We have adopted this ASU effective January 1, 2014. This adoption did not have a material impact on our consolidated balance sheets.

Concentration of Risk	3 Months Ended
Concentration of Risk	Mar. 31, 2014
Concentration of Risk
Concentration of Risk	Note 12. Concentration of Risk For the three months ended March 31, 2014, three customers accounted for approximately 38.1%, 12.6%, and 10.2% of consolidated revenue, respectively. For the three months ended March 31, 2013, one customer accounted for approximately 11.5% of consolidated revenue. At March 31, 2014, three customers accounted for 22.9%, 14.6% and 13.9% of consolidated gross accounts receivable. For the year ended December 31, 2013, the Company had three customers account for 23.2%, 14.2%, and 13.6% of consolidated gross accounts receivable, respectively.

Contingencies	3 Months Ended
Contingencies	Mar. 31, 2014
Contingencies
Contingencies	Note 13. Contingencies (a) Litigation The Company is not presently a party to any litigation that it believes might have a material adverse effect on its business operations. The Company is, from time to time, a party to litigation that arises in the normal course of its business operations. (b) Indemnifications The Company’s system sales agreements typically include provisions under which the Company agrees to take certain actions, provide certain remedies and defend its customers against third-party claims of intellectual property infringement under specified conditions and to indemnify customers against any damage and costs awarded in connection with such claims. The Company has not incurred any material costs as a result of such indemnifications and has not accrued any liabilities related to such obligations in the accompanying consolidated financial statements.

Recent Accounting Guidance	3 Months Ended
Recent Accounting Guidance	Mar. 31, 2014
Recent Accounting Guidance
Recent Accounting Guidance	Note 14. Recent Accounting Guidance Accounting Standards or Updates Recently Adopted Effective January 1, 2014, the Company adopted Accounting Standards Update (ASU) No. 2013-11, Presentation of an Unrecognized Tax Benefit When a Net Operating Loss Carryforward, a Similar Tax Loss, or a Tax Credit Carryforward Exist. ASU 2013-11 amended the presentation requirements of ASC 740, Income Taxes, and requires that a reserve for an unrecognized tax benefit be presented in the financial statements as a reduction to a deferred tax asset for a net operating loss carryforward, similar tax loss, or a tax credit carryforward. To the extent the tax benefit is not available at the reporting date under the governing tax law or if the entity does not intend to use the deferred tax asset for such purpose, the unrecognized tax benefit should be presented as a liability and not combined with deferred tax assets. The ASU became effective for annual periods, and interim periods within those years, beginning after December 15, 2013, which is fiscal 2014 for the Company. The amendments are to be applied to all unrecognized tax benefits that exist as of the effective date and may be applied retrospectively to each prior reporting period presented. The adoption of this standard did not have a material impact on our consolidated financial statements. Accounting Standards or Updates Not Yet Effective The Company has evaluated the accounting guidance recently issued and has determined that these standards or updates will not have a material impact on its financial position or results of operations.

- Definition

The entire disclosure of changes in accounting principles, including adoption of new accounting pronouncements, that describes the new methods, amount and effects on financial statement line items.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Glossary Change in Accounting Principle
-URI http://asc.fasb.org/extlink&oid=6507316

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Glossary Direct Effects of a Change in Accounting Principle
-URI http://asc.fasb.org/extlink&oid=6510796

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 250
-SubTopic 10
-Section 50
-Paragraph 3
-URI http://asc.fasb.org/extlink&oid=28359718&loc=d3e22583-107794

Reference 4: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Glossary Indirect Effects of a Change in Accounting Principle
-URI http://asc.fasb.org/extlink&oid=6515603

Reference 5: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 250
-SubTopic 10
-Section 50
-Paragraph 2
-URI http://asc.fasb.org/extlink&oid=28359718&loc=d3e22580-107794

Reference 6: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 270
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.10-01.(b)(6))
-URI http://asc.fasb.org/extlink&oid=27015980&loc=d3e46468-122699

Reference 7: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Glossary Accounting Change
-URI http://asc.fasb.org/extlink&oid=6503790

Reference 8: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 250
-SubTopic 10
-Section 50
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=28359718&loc=d3e22499-107794

Reference 9: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Glossary Retrospective Application
-URI http://asc.fasb.org/extlink&oid=6523989

Reference 10: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 270
-SubTopic 10
-Section 45
-Paragraph 13
-URI http://asc.fasb.org/extlink&oid=6372559&loc=d3e765-108305

Reference 11: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 270
-SubTopic 10
-Section 45
-Paragraph 12
-URI http://asc.fasb.org/extlink&oid=6372559&loc=d3e725-108305

Reference 12: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Regulation S-X (SX)
-Number 210
-Section 01
-Paragraph b
-Subparagraph 6
-Article 10

+ Details

Computation of Net Earnings (Loss) per Share (Tables)

3 Months Ended

Mar. 31, 2014

Computation of Net Earnings (Loss) per Share

Schedule of components of net earnings (loss) per share

	Three months ended March 31,
	2014		2013
	(in thousands, except per share data)
Net income (loss) available to common stockholders	$	174	$	(8,988	)

Weighted average common shares outstanding used in computing basic net earnings (loss) per share	110,649		108,227
Incremental options, RSUs and restricted stock	5,149		—
Weighted average common shares outstanding used in computing diluted net earnings (loss) per share	115,798		108,227
Net earnings (loss) per share
Basic	$	0.00	$	(0.08	)
Diluted	$	0.00	$	(0.08	)

Accumulated Other Comprehensive Income (Tables)

3 Months Ended

Mar. 31, 2014

Accumulated Other Comprehensive Income

Schedule of changes in accumulated other comprehensive income, net of tax

	Foreign currency			Defined benefit pension plan			Total
	(in thousands)
Balance at December 31, 2013	$	6,070		$	(331	)	$	5,739
Other comprehensive loss before reclassifications	(677		)	—			(677		)
Amounts reclassified from accumulated other comprehensive loss (1)	—			6			6
Net current-period other comprehensive income (loss)	(677		)	6			(671		)
Balance at March 31, 2014	$	5,393		$	(325	)	$	5,068

(1) Amount presented before taxes as the tax effect is not material to the consolidated financial statements.

Inventories, net (Tables)

3 Months Ended

Mar. 31, 2014

Inventories, net

Schedule of components of inventories

	March 31,		December 31,
	2014		2013
	(in thousands)
Raw materials	$	57,809	$	56,942
Work in process	29,064		27,462
Finished goods (completed systems)	$	8,660	11,385
	$	95,533	$	95,789

Restructuring Charges (Tables)

3 Months Ended

Mar. 31, 2014

Restructuring Charges.

Schedule of changes in restructuring liability

	(In thousands)
Balance at December 31, 2013	$	43
Severance and related costs	200
Cash payments	(122		)
Balance at March 31, 2014	$	121

Product Warranty (Tables)

3 Months Ended

Mar. 31, 2014

Product Warranty

Schedule of product warranty

	Three months ended March 31,
	2014			2013
	(in thousands)
Balance at January 1 (beginning of year)	$	1,428		$	1,801
Warranties issued during the period	647			457
Settlements made during the period	(467		)	(399		)
Changes in estimate of liability for pre-existing warranties during the period	12			(277		)
Balance at March 31 (end of period)	$	1,620		$	1,582
Amount classified as current	$	1,496		$	1,539
Amount classified as long-term	124			43
Total warranty liability	$	1,620		$	1,582

Fair Value Measurements (Tables)

3 Months Ended

Mar. 31, 2014

Fair Value Measurements

Schedule of Company's assets and liabilities by level within the fair value hierarchy

	March 31, 2014 Fair Value Measurements
	Level 1		Level 2		Level 3		Total
	(in thousands)
Assets
Cash equivalents:
Money market funds	$	9,106	$	—	$	—	$	9,106
Liabilities
Term loan	$	—	$	15,000	$	—	$	15,000

	December 31, 2013 Fair Value Measurements
	Level 1		Level 2		Level 3		Total
	(in thousands)
Assets
Cash equivalents:
Money market funds	$	10,504	$	—	$	—	$	10,504
Liabilities
Term loan	$	—	$	15,000	$	—	$	15,000

Stock-Based Compensation (Details) - USD ($) $ in Millions	3 Months Ended
Stock-Based Compensation (Details) - USD ($) $ in Millions	Mar. 31, 2014	Mar. 31, 2013
Stock award plans and stock-based compensation
Stock-based compensation expense (in dollars)	$ 1.2	$ 0.8
2000 Stock Plan
Stock award plans and stock-based compensation
Number of shares of common stock available for future grant	0

Gain on Sale of Dry Strip Assets and Intellectual Property (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2013	Dec. 31, 2012
Sale of assets
Gain on sale of dry strip assets and intellectual property	$ 368
Dry strip product line, intellectual property rights and certain assets
Sale of assets
Contingent purchase price		$ 2,000
Gain on sale of dry strip assets and intellectual property	$ 400

Computation of Net Earnings (Loss) per Share (Details) - USD ($) $ / shares in Units, $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Computation of Net Earnings (Loss) per Share
Net income (loss) available to common stockholders (in dollars)	$ 174	$ (8,988)
Weighted average common shares outstanding used in computing basic net earnings (loss) per share	110,649,000	108,227,000
Incremental options, RSUs and restricted stock	5,149,000
Weighted average common shares outstanding used in computing diluted net earnings (loss) per share	115,798,000	108,227,000
Net earnings (loss) per share
Basic (in dollars per share)	$ 0.00	$ (0.08)
Diluted (in dollars per share)	$ 0.00	$ (0.08)
Incremental shares excluded from the calculation of net loss per share (in shares)		2,103,634

- Definition

The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.

+ References + Details

Accumulated Other Comprehensive Income (Details) $ in Thousands	3 Months Ended
	Mar. 31, 2014 USD ($)
Changes in accumulated other comprehensive loss, net of tax
Balance at the beginning of period	$ 5,739
Other comprehensive loss before reclassifications	(677)
Amounts reclassified from accumulated other comprehensive loss	6
Net current-period other comprehensive income (loss)	(671)
Balance at the end of period	5,068
Foreign currency
Changes in accumulated other comprehensive loss, net of tax
Balance at the beginning of period	6,070
Other comprehensive loss before reclassifications	(677)
Net current-period other comprehensive income (loss)	(677)
Balance at the end of period	5,393
Defined benefit pension plan
Changes in accumulated other comprehensive loss, net of tax
Balance at the beginning of period	(331)
Amounts reclassified from accumulated other comprehensive loss	6
Net current-period other comprehensive income (loss)	6
Balance at the end of period	$ (325)

- Definition

Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.

+ References + Details

Inventories, net (Details) $ in Thousands	3 Months Ended
Inventories, net (Details) $ in Thousands	Mar. 31, 2014 USD ($)	Mar. 31, 2013 USD ($) mm	Dec. 31, 2013 USD ($)
Inventories, net
Raw materials	$ 57,809		$ 56,942
Work in process	29,064		27,462
Finished goods (completed systems)	8,660		11,385
Inventories, net	95,533		95,789
Inventories, net
Cost of sales due to below normal production capacity	0	$ 500
Dry strip product line, intellectual property rights and certain assets
Inventories, net
Inventory reserves	$ 24,600	$ 2,100	$ 25,100
Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters) \| mm		300

Restructuring Charges (Details) - USD ($) $ in Thousands	3 Months Ended
Restructuring Charges (Details) - USD ($) $ in Thousands	Mar. 31, 2014	Mar. 31, 2013	Dec. 31, 2013
Changes in restructuring liability
Severance and related costs	$ 200	$ 1,801
Severance
Restructuring charges
Restructuring costs accrued and unpaid	100
Changes in restructuring liability
Balance at the beginning of the period	43
Severance and related costs	200
Cash payments	(122)
Balance at the end of the period	$ 121
Severance \| Maximum
Restructuring charges
Restructuring costs accrued and unpaid			$ 100

Product Warranty (Details) - USD ($) $ in Thousands	3 Months Ended
Product Warranty (Details) - USD ($) $ in Thousands	Mar. 31, 2014	Mar. 31, 2013	Mar. 31, 2014	Dec. 31, 2013	Mar. 31, 2013
Product Warranty
Product warranty period	1 year
Changes in product warranty liability
Balance at the beginning of the period	$ 1,428	$ 1,801
Warranties issued during the period	647	457
Settlements made during the period	(467)	(399)
Changes in estimate of liability for pre-existing warranties during the period	12	(277)
Balance at the end of the period	1,620	1,582
Product warranty classification
Amount classified as current			$ 1,496	$ 1,316	$ 1,539
Amount classified as long-term			124		43
Total warranty liability	$ 1,428	$ 1,582	$ 1,620	$ 1,428	$ 1,582

Fair Value Measurements (Details) - Recurring - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Level 1 \| Money market funds
Fair Value Measurements
Money market funds	$ 9,106	$ 10,504
Level 2 \| Term Loan
Fair Value Measurements
Term loan	15,000	15,000
Total \| Term Loan
Fair Value Measurements
Term loan	15,000	15,000
Total \| Money market funds
Fair Value Measurements
Money market funds	$ 9,106	$ 10,504

Financing Arrangements (Details) - USD ($) $ in Millions		3 Months Ended
Financing Arrangements (Details) - USD ($) $ in Millions	Jul. 05, 2013	Mar. 31, 2014
Revolving credit facility
Financial Arrangements
Term		2 years
Maximum borrowing capacity under the credit facility		$ 10.0
Available borrowing capacity under the credit facility		8.9
Borrowings against credit facility		$ 0.0
Revolving credit facility \| Maximum
Financial Arrangements
Limitation on ability to borrow expressed as a percentage of the then current amount of qualified accounts receivable		80.00%
Term Loan
Financial Arrangements
Term	3 years
Amount of borrowings	$ 15.0
Interest rate per annum (as a percent)	5.50%

Income Taxes (Details) - USD ($)	3 Months Ended
Income Taxes (Details) - USD ($)	Mar. 31, 2014	Dec. 31, 2013
Valuation allowance
Valuation allowance related to income taxes		$ 147,500,000
Deferred tax assets, net of valuation allowance	$ 0
United States
Valuation allowance
Period of cumulative loss position	3 years
Percentage of valuation allowance	100.00%

Concentration of Risk (Details) - item	3 Months Ended		12 Months Ended
Concentration of Risk (Details) - item	Mar. 31, 2014	Mar. 31, 2013	Dec. 31, 2013
Consolidated Revenue \| Customer concentration risk
Concentration of risk
Number of customers	3	1
Consolidated Revenue \| Customer concentration risk \| One customer
Concentration of risk
Percentage of concentration risk	38.10%	11.50%
Consolidated Revenue \| Customer concentration risk \| Second customer
Concentration of risk
Percentage of concentration risk	12.60%
Consolidated Revenue \| Customer concentration risk \| Third customer
Concentration of risk
Percentage of concentration risk	10.20%
Consolidated gross accounts receivable \| Credit concentration risk
Concentration of risk
Number of customers	3		3
Consolidated gross accounts receivable \| Credit concentration risk \| One customer
Concentration of risk
Percentage of concentration risk	22.90%		23.20%
Consolidated gross accounts receivable \| Credit concentration risk \| Second customer
Concentration of risk
Percentage of concentration risk	14.60%		14.20%
Consolidated gross accounts receivable \| Credit concentration risk \| Third customer
Concentration of risk
Percentage of concentration risk	13.90%		13.60%