SEC Form 3

FORM 3

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940

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1. Name and Address of Reporting Person* Halterman Craig M (Last) (First) (Middle) 108 CHERRY HILL DRIVE (Street) BEVERLY MA 01915 (City) (State) (Zip)	2. Date of Event Requiring Statement (Month/Day/Year) 05/12/2005	3. Issuer Name and Ticker or Trading Symbol AXCELIS TECHNOLOGIES INC [ ACLS ]
		4. Relationship of Reporting Person(s) to Issuer (Check all applicable) Director 10% Owner X Officer (give title below) Other (specify below) Senior VP and CIO	5. If Amendment, Date of Original Filed (Month/Day/Year)
			6. Individual or Joint/Group Filing (Check Applicable Line) X Form filed by One Reporting Person Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Beneficially Owned
1. Title of Security (Instr. 4)	2. Amount of Securities Beneficially Owned (Instr. 4)	3. Ownership Form: Direct (D) or Indirect (I) (Instr. 5)	4. Nature of Indirect Beneficial Ownership (Instr. 5)
Common Stock	3,436.3	D

Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 4)	2. Date Exercisable and Expiration Date (Month/Day/Year)		3. Title and Amount of Securities Underlying Derivative Security (Instr. 4)		4. Conversion or Exercise Price of Derivative Security	5. Ownership Form: Direct (D) or Indirect (I) (Instr. 5)	6. Nature of Indirect Beneficial Ownership (Instr. 5)
	Date Exercisable	Expiration Date	Title	Amount or Number of Shares
Right to Buy (Stock Option)	07/10/2004	07/10/2010	Common Stock	30,400	22	D
Right to Buy (Stock Option)	07/30/2005	01/30/2006	Common Stock	10,000	14.1	D
Right to Buy (Stock Option)	07/30/2005(1)	07/30/2011	Common Stock	8,500	14.1	D
Right to Buy (Stock Option)	07/30/2005(2)	07/30/2011	Common Stock	8,500	13.2	D
Right to Buy (Stock Option)	06/21/2006(3)	06/21/2012	Common Stock	25,000	10.28	D
Right to Buy (Stock Option)	06/21/2006(4)	06/21/2012	Common Stock	25,000	5.85	D
Right to Buy (Stock Option)	05/01/2007(5)	05/01/2013	Common Stock	7,500	5.7	D
Right to Buy (Stock Option)	05/01/2007(6)	05/01/2013	Common Stock	7,500	11.48	D
Right to Buy (Stock Option)	06/25/2008(7)	06/25/2014	Common Stock	12,500	11.87	D
Right to Buy (Stock Option)	06/25/2008(8)	06/25/2014	Common Stock	12,500	7.97	D

Explanation of Responses:

1. Exercisable as to 25% of the shares on each of 7/30/2002, 7/30/2003, 7/30/2004 and 7/30/2005.

2. Exercisable as to 25% of the shares on each of 7/30/2002, 7/30/2003, 7/30/2004 and 7/30/2005.

3. Exercisable as to 25% of the shares on 6/21/2003, 6/21/2004, 6/21/2005 and 6/21/2006.

4. Exercisable as to 25% of the shares on 6/21/2003, 6/21/2004, 6/21/2005 and 6/21/2006.

5. Exercisable as to 25% of the total shares on each of 5/01/2004, 5/01/2005, 5/01/2006 and 5/01/2007.

6. Exercisable as to 25% of the total shares on each of 5/01/2004, 5/01/2005, 5/01/2006 and 5/01/2007.

7. Exercisable as to 25% of the total shares on each of 6/25/2005, 6/25/2006, 6/25/2007 and 6/25/2008.

8. Exercisable as to 25% of the total shares on each of 6/25/2005, 6/25/2006, 6/25/2007 and 6/25/2008.

	Lynnette C. Fallon, as attorney in fact for Craig M. Halterman	05/19/2005
	** Signature of Reporting Person	Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 5 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
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POWER OF ATTORNEY
For Executing Reports under Section 16(a)
with respect to securities of
AXCELIS TECHNOLOGIES INC.
	The undersigned hereby constitutes and appoints each of Mary G. Puma, Lynnette C.
Fallon, Matthew C. Dallett and Stanley Keller, each acting singly, the undersigned's true and
lawful attorney-in-fact, from the date hereof until this Power of Attorney is revoked, to:
(1)	execute, for and on behalf of the undersigned, Forms 3, 4 and 5 with respect to securities
of Axcelis Technologies, Inc. in accordance with Section 16(a) of the Securities
Exchange Act of 1934 and the rules thereunder, it being understood that the documents
executed by such attorney-in-fact on behalf of the undersigned pursuant to this Power of
Attorney shall be in such form and shall contain such terms and conditions as such
attorney-in-fact may approve in his or her discretion; and
(2)	do and perform any and all acts, for and on behalf of the undersigned, that may be
necessary or desirable to complete the execution of any such Form 3, 4 or 5 and the
timely filing of such form with the United States Securities and Exchange Commission
and any other authority.
	The undersigned hereby grants to each such attorney-in-fact full power and authority to
do and perform all and every act and thing whatsoever requisite, necessary and proper to be done
in the exercise of any of the rights and powers herein granted, as fully for all intents and
purposes as the undersigned might or could do if personally present, with full power of
substitution or revocation, hereby ratifying and confirming all that such attorney-in-fact, or his or
her substitute or substitutes, shall lawfully do or cause to be done by virtue of this power of
attorney and the rights and powers herein granted.  The undersigned acknowledges that the
foregoing attorneys-in-fact, in serving in such capacity at the request of the undersigned, are not
assuming any of the undersigned's responsibilities to comply with Section 16 of the Securities
Exchange Act of 1934.
	IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be
executed this 12th day of May, 2005.



						/s/  Craig Halterman_____________________
						Craig Halterman




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