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      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureShareRepurchaseDetails" id="DisclosureShareRepurchaseDetails">
        <link:definition>41501 - Disclosure - Share Repurchase (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20230630_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20230630_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20230630_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20230630_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:import namespace="http://xbrl.sec.gov/ecd/2023" schemaLocation="https://xbrl.sec.gov/ecd/2023/ecd-2023.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/dei/2023" schemaLocation="https://xbrl.sec.gov/dei/2023/dei-2023.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/2022-03-31" schemaLocation="https://www.xbrl.org/dtr/type/2022-03-31/types.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
  <xsd:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <xsd:import namespace="http://fasb.org/us-roles/2023" schemaLocation="https://xbrl.fasb.org/us-gaap/2023/elts/us-roles-2023.xsd" />
  <xsd:import namespace="http://fasb.org/us-gaap/2023" schemaLocation="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd" />
  <xsd:import namespace="http://fasb.org/srt/2023" schemaLocation="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/ecd-sub/2023" schemaLocation="https://xbrl.sec.gov/ecd/2023/ecd-sub-2023.xsd" />
  <xsd:element name="SecondLargestCustomerMember" id="acls_SecondLargestCustomerMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ThirdLargestCustomerMember" id="acls_ThirdLargestCustomerMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="LargestCustomerMember" id="acls_LargestCustomerMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ConcentrationRiskNumberOfCustomers" id="acls_ConcentrationRiskNumberOfCustomers" type="xbrli:integerItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_ProductWarrantyPeriod" name="ProductWarrantyPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" name="LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_DepositRelatingToCustomsActivity" name="DepositRelatingToCustomsActivity" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_SaleAndLeaseBackMember" name="SaleAndLeaseBackMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_BeverlyPropertyOwnerLlcMember" name="BeverlyPropertyOwnerLlcMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_CashCashEquivalentsAndRestrictedCashAbstract" name="CashCashEquivalentsAndRestrictedCashAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_CashCashEquivalentsAndRestrictedCashTextBlock" name="CashCashEquivalentsAndRestrictedCashTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" name="CashCashEquivalentsAndRestrictedCashTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" name="MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_ProvisionForExcessAndObsoleteInventory" name="ProvisionForExcessAndObsoleteInventory" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_ServicesMember" name="ServicesMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_AfterMarketMember" name="AfterMarketMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_PercentageOfPaymentUponShipmentOfTool" name="PercentageOfPaymentUponShipmentOfTool" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_PeriodOfPaymentUponDeliveryOfParts" name="PeriodOfPaymentUponDeliveryOfParts" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_PercentageOfPaymentUponInstallation" name="PercentageOfPaymentUponInstallation" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" name="RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_InternalUsedAssetsTypeAxis" name="InternalUsedAssetsTypeAxis" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:dimensionItem" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_InternalUsedAssetsTypeDomain" name="InternalUsedAssetsTypeDomain" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_NewSystemsRevenueMember" name="NewSystemsRevenueMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_LeaseDisclosureTextBlock" name="LeaseDisclosureTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_OperatingAndFinanceLeaseRightOfUseAsset" name="OperatingAndFinanceLeaseRightOfUseAsset" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_OperatingAndFinanceLeaseLiability" name="OperatingAndFinanceLeaseLiability" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_FinanceLeaseAccumulatedDepreciation" name="FinanceLeaseAccumulatedDepreciation" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_FinanceLeaseCost" name="FinanceLeaseCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_LeaseBalanceSheetDisclosureTableTextBlock" name="LeaseBalanceSheetDisclosureTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_LeaseCashFlowInformationDisclosureTableTextBlock" name="LeaseCashFlowInformationDisclosureTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_ShortTermAndVariableLeaseCost" name="ShortTermAndVariableLeaseCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_LeaseQuantitativeDisclosureTableTextBlock" name="LeaseQuantitativeDisclosureTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" name="WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" name="FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" name="LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_ContractWithCustomerLiabilityDeferralOfRevenue" name="ContractWithCustomerLiabilityDeferralOfRevenue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" name="OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_NetSettlementOnRestrictedStockGrants" name="NetSettlementOnRestrictedStockGrants" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_SiliconValleyBankMember" name="SiliconValleyBankMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour" name="FinanceLeaseLiabilityPaymentsDueAfterYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" name="LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element name="ProductOrServiceMember" id="acls_ProductOrServiceMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="IncreaseDecreaseInIncomeTaxExpenseBenefit" id="acls_IncreaseDecreaseInIncomeTaxExpenseBenefit" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="debit" />
  <xsd:element name="CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" id="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="debit" />
  <xsd:element name="EarningsPerShareDetailAbstract" id="acls_EarningsPerShareDetailAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="EarningsPerShareDetailsOtherDisclosuresAbstract" id="acls_EarningsPerShareDetailsOtherDisclosuresAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="UsGovernmentSecuritiesAndAgencyInvestmentsMember" id="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="AreaOfLandFinanceLeaseNotYetCommenced" id="acls_AreaOfLandFinanceLeaseNotYetCommenced" type="dtr-types:areaItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" />
  <xsd:element name="CashCollateralForLeaseObligation" id="acls_CashCollateralForLeaseObligation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="debit" />
</xsd:schema>
