Axcelis Achieves Two New Design Wins from Chipmakers in Asia

Demand accelerates for Optima HD platform

BEVERLY, Mass.--(BUSINESS WIRE)--May 1, 2007--Axcelis Technologies, Inc. (NASDAQ: ACLS) today announced it has received two new design wins for its Optima HD high dose ion implanter from two of the world's leading chipmakers located in Asia. The systems will ship during the second quarter of 2007.

"We are very excited about these two new penetrations of Optima HD technology," said Mary Puma, chairman and CEO of Axcelis. "With the Optima HD, we have demonstrated the ability to address a wide range of implant applications as well as meet the rigorous productivity demands of a high volume chip manufacturing environment. Axcelis has now penetrated foundries, memory and logic fabs with the Optima HD. It is quickly becoming the implanter of choice for customers requiring the most advanced technology, with maximum productivity and yield."

With the market's widest energy range of 200eV to 80KeV, the Optima HD is the only ion implant platform that addresses both conventional high dose implants and emerging applications like molecular and hydrogen implantation, which are increasingly important at the 45nm technology node and beyond. Further, Axcelis' advanced spot beam technology offers exceptional uniformity and repeatability.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete lifecycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is www.axcelis.com.

    CONTACT: Company Contact:
             Axcelis Technologies, Inc.
             David Snyder, +1-978-787-4273
             Fax: +1-978-787-4275
             david.snyder@axcelis.com
             or
             Investor Contact:
             Axcelis Technologies, Inc.
             Steve Bassett, +1-978-787-4000
             Fax: +1-978-787-9133
             investor.relations@axcelis.com
             or
             Agency Contact:
             Loomis Group
             Heather Smith, +1-617-309-8005
             Fax: +1-617-638-0033
             smithh@loomisgroup.com

    SOURCE: Axcelis Technologies, Inc.