Corporate Governance

Organizational Documents
Date Title
May 16, 2022
227.31 KB
November 2, 2017

Committee Charters and Governance Policies

Each of the Board Committees has a written charter. In addition, the Nominating and Governance Committee of Axcelis Technologies, Inc. has adopted the following policies to address specific issues relating to the operations of our Board of Directors and its committees. These written policies seek to document our Board's governance processes to ensure that the Company fully benefits from the insight and oversight of our Board members.

Date Title
May 10, 2024
August 10, 2023
August 10, 2023
February 16, 2023
November 13, 2020
November 7, 2019
February 15, 2017
November 14, 2016


Axcelis has adopted an Ethics Policy applicable to all directors, officers and employees, addressing the issues of conflicts of interest and compliance with law and providing for an enforcement mechanism. Any waivers of our Ethics Policy for directors or executive officers must be approved by the Board and will be promptly disclosed on this page for at least a 12 month period.
Date Title
June 1, 2015

Corporate Social Responsibility Policy

Axcelis has adopted a Corporate Social Responsibility Policy to express the Company’s position on global human rights, labor practices, safety and related matters.
Date Title
August 15, 2019