Management

Dr. Russell Low became Axcelis’ CEO in May 2023. Dr. Low joined Axcelis in October 2016, first serving as Executive Vice President, Engineering and then as Executive Vice President, Global Customer and Engineering Operations effective January 2021. Prior to joining the Company, Dr. Low held the position of Vice President of Engineering, MOCVD Business Unit at Veeco Instruments since 2013, prior to which he was Veeco’s Senior Director of Engineering, Molecular Beam Epitaxy Business Unit beginning in 2012.
From 2003 to 2012, Dr. Low held a number of positions at Varian Semiconductor Equipment Associates, most recently as Director of Technology. Prior to that, Dr. Low held engineering positions in the thermal processing and ion implant divisions of Applied Materials, Inc. Dr. Low received his Ph.D. in Physical Chemistry from Oxford University. He also holds an Executive MBA from the Massachusetts Institute of Technology, a BS degree from Southampton University, and was a Visiting Fellow at Stanford University. He has 44 granted US patents over multiple categories and has authored over 20 refereed papers.

Executive Vice President and Chief Financial Officer, Kevin J. Brewer plays a central role in driving operational efficiencies, improving financial performance, and increasing the Company’s pace of profitable growth. In addition to managing the Axcelis finance organization, Mr. Brewer also oversees manufacturing, supply chain and logistics at Axcelis.
Until assuming the role of CFO, Mr. Brewer held the position of Executive Vice President, Global Operations. Prior to joining Axcelis in 1999, Mr. Brewer was Director of Operations, Business Jets, at Raytheon Aircraft Company. Brewer also held various management positions in operations and strategic planning in Raytheon Company’s Electronic Systems and Missile Systems groups. Brewer holds a BS degree in Mechanical Engineering Technology from Southeastern Massachusetts University, and a Master’s degree in Business Administration from New Hampshire College. Mr. Brewer was named 2016 CFO of the Year in the public company category by the Boston Business Journal (BBJ). The award recognizes the top chief financial officers who deliver the most outstanding performance for their Massachusetts companies.




