Russell Low, PhD
President and Chief Executive Officer
Russell Low, PhD

Dr. Russell Low became Axcelis’ CEO in May 2023. Dr. Low joined Axcelis in October 2016, first serving as Executive Vice President, Engineering and then as Executive Vice President, Global Customer and Engineering Operations effective January 2021. Prior to joining the Company, Dr. Low held the position of Vice President of Engineering, MOCVD Business Unit at Veeco Instruments since 2013, prior to which he was Veeco’s Senior Director of Engineering, Molecular Beam Epitaxy Business Unit beginning in 2012.

From 2003 to 2012, Dr. Low held a number of positions at Varian Semiconductor Equipment Associates, most recently as Director of Technology. Prior to that, Dr. Low held engineering positions in the thermal processing and ion implant divisions of Applied Materials, Inc. Dr. Low received his Ph.D. in Physical Chemistry from Oxford University. He also holds an Executive MBA from the Massachusetts Institute of Technology, a BS degree from Southampton University, and was a Visiting Fellow at Stanford University.  He has 44 granted US patents over multiple categories and has authored over 20 refereed papers.

Kevin J. Brewer
Executive Vice President and Chief Financial Officer
Kevin Brewer

Executive Vice President and Chief Financial Officer, Kevin J. Brewer plays a central role in driving operational efficiencies, improving financial performance, and increasing the Company’s pace of profitable growth. In addition to managing the Axcelis finance organization, Mr. Brewer also oversees manufacturing, supply chain and logistics at Axcelis.


Until assuming the role of CFO, Mr. Brewer held the position of Executive Vice President, Global Operations. Prior to joining Axcelis in 1999, Mr. Brewer was Director of Operations, Business Jets, at Raytheon Aircraft Company. Brewer also held various management positions in operations and strategic planning in Raytheon Company’s Electronic Systems and Missile Systems groups. Brewer holds a BS degree in Mechanical Engineering Technology from Southeastern Massachusetts University, and a Master’s degree in Business Administration from New Hampshire College. Mr. Brewer was named 2016 CFO of the Year in the public company category by the Boston Business Journal (BBJ). The award recognizes the top chief financial officers who deliver the most outstanding performance for their Massachusetts companies.

Lynnette C. Fallon
Executive Vice President, Human Resources and Legal, General Counsel
Lynnette Fallon
Lynnette Fallon oversees Axcelis' legal and human resources operations, and also serves as Axcelis' corporate secretary. She joined Axcelis in April 2001 as senior vice president and general counsel. Previously, Fallon spent nearly a decade as a partner in the Boston law firm of Palmer & Dodge LLP, where she was head of the Business Law Department from 1997 to 2001. Fallon holds a bachelor's degree from Vassar College and received her JD from Boston University School of Law.
Douglas A. Lawson
Executive Vice President, Corporate Marketing and Strategy
Douglas Lawson
Doug Lawson oversees all corporate marketing operations and strategy development for Axcelis Technologies. Before assuming this role, Mr. Lawson held the position of Senior Vice President of Strategic Initiatives. Prior to joining the company in 2011, he held the position of General Manager of Luminus Devices. He has over 25 years of experience in the technology industry, and has held numerous executive and technical positions at BTU International, PRI Automation, Digital Equipment and Intel. Doug holds a BS degree in Chemical Engineering from University of Lowell, as well as an MS degree in Manufacturing Engineering and an MBA from Boston University.
Greg Redinbo, PhD
Executive Vice President, Marketing and Applications
Greg Redinbo image
Greg Redinbo leads our efforts in developing products and marketing strategies.  He joined Axcelis in 2021 as Senior Vice President of Strategic Marketing and Business Development. Greg has over 25 years of experience in the semiconductor capital equipment industry.  Prior to joining Axcelis, he held the position of Vice President, Global Strategic Accounts at ASML, where his focus was on business and relationship growth with a leading logic manufacturer and prior to that was Global Vice President of Sales, Service and Applications at FEI, a microscopy solutions company.  His past positions also include Director of Sales, US and Europe, and Director of Product Marketing, High Current Products at Varian Semiconductor and Product Management in the Thermal Processing Division at Applied Materials. Greg holds a Ph.D. in Applied Physics from Cornell University and Bachelor of Science in Electrical Engineering from the University of California, Davis. He has published numerous technical papers and holds a number of patents.