AXCELIS ANNOUNCES MULTIPLE NEW AND FOLLOW-ON SHIPMENTS OF PURION POWER SERIES IMPLANTERS TO POWER DEVICE CHIPMAKERS WORLDWIDE

BEVERLY, Mass., Oct. 19, 2022 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced multiple new and follow-on shipments of the Company's Purion Power Series™ implanters to leading power device chipmakers in both silicon and silicon carbide technologies. The systems include the Purion H200™ high current, Purion H200 SiC high current, Purion XE™ SiC high energy, and the Purion M™ SiC medium current. These customers will use the systems in high volume production of power devices supporting automotive and other power management markets.

President and CEO Mary Puma commented, "The power device market continues to drive our growth globally and will likely account for between 35 and 40 percent of our system shipments in 2022.  This growth is a long-term trend driven by the transition to electric vehicles and should benefit Axcelis for many years to come."

Executive Vice President of Marketing and Applications, Greg Redinbo, commented, "The Purion Power Series tools incorporate unique features and process control capabilities, including the platform's silicon, thin silicon and silicon carbide capability, that are enabling for the power device market. Axcelis is uniquely positioned to benefit from growth in this market due to these unique capabilities and the implant-intensive nature of power devices."

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 40 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552