Axcelis Announces Multiple Shipments Of Purion High Energy Systems To Leading CMOS Image Sensor Manufacturers
President and CEO
Executive Vice President of Product Development,
The Purion High Energy Platform
The Purion High Energy Series includes a variety of implanters allowing customers to select the optimal energy level for their application: the industry leading Purion XE; the Purion EXE for enhanced productivity; the Purion VXE for high volume and higher energy applications; the Purion XE Power Series for power devices; and, the new Purion XEmax with patented Boost™ technology for metals reduction and the ultra-high energies required for next generation image sensors.
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