Axcelis Announces Participation in SEMICON Japan 2024
Semiconductor manufacturers are invited to visit the
- Purion Power Series™ - Featuring Axcelis' innovative solution for thin silicon, TAIKO and silicon carbide (SiC) wafer processing across the full power device applications space, and wafer handling capable for 150mm, 200mm and 300mm wafers.
- Purion H™ Series - Offering unmatched purity and precision while achieving industry leading productivity across the full high current operating space.
- Purion H200™ -
Axcelis' state of the art single wafer high current medium energy implanter designed to address the unique implant needs for devices designed for the Internet of Things (IoT) and power applications. - Purion XE™ Series - The industry leading high energy implant platform with the widest energy range, including the Purion XEmax model featuring patented Boost Technology™ for the most advanced image sensor applications up to 15MeV.
- Purion M™ Series - The lowest power consumption medium current implanter offering the broadest range of mid-current doses available, and unparalleled flexibility to meet today's evolving implant requirements.
- GSD Ovation™ - Providing the most cost-effective way to extend high current and high energy batch platform capability by supporting emerging applications in wafer splitting (Si and SiC) and alternate substrates (lithium tantalate and ceramic).
During the show,
- SiC Power Device Manufacturing Ion Implant Technology
Exhibitor's TechSPOT Hall 5,15:30 - 15:50 p.m.
The power device market is at a critical inflection point as chipmakers transition from 150mm to 200mm SiC wafers. Ion implant equipment needs to offer the flexibility to handle multiple wafer sizes, various substrate types and operate at various implant temperatures. Please join us to learn aboutAxcelis' Silicon & Silicon Carbide (SiC) power semiconductor product line, SiC implant Al ion sources and productivity options and Si IGBT wafer handling and proton (H+) implant solutions. - Axcelis Happy Hour Celebration
Hall 4 Booth #4261, 16:00 –17:00 p.m.
Join us for beverages and appetizers and meet theAxcelis team!
President and CEO of Axcelis Technologies
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