Axcelis Announces Sponsorship and Participation in the 23rd International Conference on Silicon Carbide and Related Materials (ICSCRM 2026)

BEVERLY, Mass., Sept. 21, 2026 /PRNewswire/ -- Axcelis Technologies, Inc. (NASDAQ: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, will be participating in the 23^rd International Conference on Silicon Carbide and Related Materials (ICSCRM 2026) taking place September 28 - October 2, 2026, at the Pacifico Yokohama North in Japan.

At the event, Axcelis will host a company exhibit in Booth #F3 and the company's technologists and collaborators will present on the following topics:

• Suppression of Stacking Fault Expansion in SiC Epitaxial Layers via Substrate Implantation
• n-Type 4H-SiC Contact Engineering by Implantation-Annealing Co-Optimization
• Manufacturability of Single Epi Step 1200V SiC Superjunction Pillars Using Channeling Ion Implantation
• Sensitivity of SiC Superjunction MOSFET Performance to High-Energy Implantation of p-Pillars

President and CEO of Axcelis, Dr. Russell Low, said, "We are excited to participate in ICSCRM 2026, one of the premier technology forums for the power device market. As a world leader in ion implantation solutions for power devices, Axcelis is proud to support this dynamic market with our Purion Power Series+™ platform, which delivers enabling, highly differentiated capabilities and advanced process control. Ion implantation is one of the most critical steps in manufacturing silicon carbide devices, a market Yole Group estimates will reach $11 billion by 2031, growing at a 20% CAGR from 2025 to 2031."

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for nearly 50 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Investor Relations Contact:
David Ryzhik
Senior Vice President and Interim CFO
Telephone: (978) 787-2352
Email: David.Ryzhik@axcelis.com

Press/Media Relations Contacts: 
Maureen Hart
Senior Director, Corporate & Marketing Communications
Telephone: (978) 787-4266
Email: Maureen.Hart@axcelis.com

View original content to download multimedia:https://www.prnewswire.com/news-releases/axcelis-announces-sponsorship-and-participation-in-the-23rd-international-conference-on-silicon-carbide-and-related-materials-icscrm-2026-302883758.html

SOURCE Axcelis Technologies, Inc.