Axcelis Announces Timing of 1st Quarter Results Conference Call and Live Webcast

BEVERLY, Mass., Mar 27, 2002 (BUSINESS WIRE) -- Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced that the company will be hosting a conference call on Wednesday, April 24, 2002, beginning at 5:00 pm EST. The purpose of the call is to discuss first quarter and results and to provide guidance for the second quarter of 2002.

The call will be available to interested listeners via an audio webcast that can be accessed through Axcelis' home page at www.axcelis.com, or by dialing 1-800-360-9865 (1-973-694-6836 outside North America). Participants calling into the conference call will be requested to provide the company name: Axcelis Technologies, the conference leader: Mark Namaroff, and pass code: Axcelis 1Q. A telephone replay will also be available from 8:00 pm EST on April 24, 2002 until 5:00 pm EST on May 1st, 2002. Dial 1-800-428-6051 (1-973-709-2089 outside North America). Please enter conference ID code #236117. A webcast replay will also be available from 8:00 pm EST on April 24, 2002 until 5:00 pm EST May 21, 2002.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT:
Company Contact:
Maureen Hart
Axcelis Technologies, Inc.
(978) 787-4266
maureen.hart@axcelis.com
or
Investor Contact:
Mark Namaroff
Axcelis Technologies, Inc.
(978) 787-4000
investor.relations@axcelis.com
or
Agency Contact:
Dave Snyder
The Loomis Group Inc.
(617) 638-0022
snyderd@loomisgroup.com