Axcelis Announces Timing of Second Quarter Conference Call and Live Webcast

BEVERLY, Mass.--(BUSINESS WIRE)--July 12, 2005--Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced that the company will be hosting a conference call on Wednesday, July 27, 2005, beginning at 5:00 pm ET. The purpose of the call is to discuss second quarter results for 2005 and to provide guidance for the third quarter of 2005.

The call will be available to interested listeners via an audio webcast that can be accessed through Axcelis' home page at www.axcelis.com, or by dialing 1-800-475-3716 (1-719-457-2728 outside North America). Participants calling into the conference call will be requested to provide the company name: Axcelis Technologies, the conference leader: James Kawski, and pass code: #1164852. A telephone replay will be available from 8:00 pm ET on July 27, 2005 until 11:59 pm ET on August 3, 2005. Dial 1-888-203-1112 (1-719-457-0820 outside North America), and enter conference ID code #1164852. A webcast replay will be available from 8:00 pm ET on July 27, 2005 until 5:00 pm ET August 27, 2005.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT: Company Contact:
Axcelis Technologies, Inc.
Maureen Hart, 978-787-4266
maureen.hart@axcelis.com
or
Investor Contact:
Axcelis Technologies, Inc.
James Kawski, 978-787-4000
investor.relations@axcelis.com
or
Agency Contact:
The Loomis Group
Heather Smith, 617-638-0022
smithh@loomisgroup.com

SOURCE: Axcelis Technologies, Inc.