Axcelis Announces Timing of Third Quarter Conference Call and Live Webcast

October 21, 2004 at 11:38 AM EDT

BEVERLY, Mass.--(BUSINESS WIRE)--Oct. 21, 2004--Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced that the company will be hosting a conference call on Wednesday, November 3, 2004, beginning at 5:00 pm EST. The purpose of the call is to discuss third quarter results and to provide guidance for the fourth quarter of 2004.

The call will be available to interested listeners via an audio webcast that can be accessed through Axcelis' home page at www.axcelis.com, or by dialing 1-800-500-0177 (1-719-457-2679 outside North America). Participants calling into the conference call will be requested to provide the company name: Axcelis Technologies, the conference leader: Jim Kawski, and pass code: Axcelis Q3. A telephone replay will be available from 8:00 pm EST on November 3, 2004 until 11.59 pm EST on November 10, 2004. Dial 1-888-203-1112 (1-719-457-0820 outside North America), and enter conference ID code #350309. A webcast replay will be available from 8:00 pm EST on November 3, 2004 until 5:00 pm EST December 1, 2004

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT:
Axcelis Technologies, Inc.
Maureen Hart, 978-787-4266
maureen.hart@axcelis.com

Investor Contact:
James Kawski, 978-787-4000
investor.relations@axcelis.com

Agency Contact:
The Loomis Group
Stacy Grisinger, 617-638-0022
grisingers@loomisgroup.com