Axcelis Announces Timing of Third Quarter Conference Call and Live Webcast

October 17, 2006 at 4:01 PM EDT

BEVERLY, Mass.--(BUSINESS WIRE)--Oct. 17, 2006--Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced that the company will be hosting a conference call on Wednesday, November 1, 2006, beginning at 5:00 pm ET. The purpose of the call is to discuss third quarter results and to provide guidance for the fourth quarter of 2006.

The call will be available to interested listeners via an audio webcast that can be accessed through Axcelis' home page at www.axcelis.com, or by dialing 1-800-479-1628 (1-719-457-2729 outside North America). Participants calling into the conference call will be requested to provide the company name: Axcelis Technologies, the conference leader: Maureen Hart, and pass code: #1342692. A webcast replay will be available from 8:00 pm ET on November 1, 2006 until 5:00 pm ET December 1, 2006.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT: Company Contact: Axcelis Technologies, Inc. Maureen Hart, 978-787-4266 Fax: 978-787-4275 maureen.hart@axcelis.com or Investor Contact: Axcelis Technologies, Inc. Heather Carberry, 978-787-4116 Fax: 978-787-9133 investor.relations@axcelis.com or Agency Contact: The Loomis Group Heather Smith, 617-638-0022 Fax: 617-638-0033 smithh@loomisgroup.com SOURCE: Axcelis Technologies, Inc.